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Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method

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Journal of Materials Science Letters

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References

  1. A. Sokolowska, in “Non-conventional methods of materials synthesis” (PWN, Warsaw, 1991) (in Polish).

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Authors and Affiliations

  1. Department of Material Science and Engineering, Warsaw University of Technology, 02-524 Warsaw, 85, Narbutta, Poland

    K. Rożniatowski, A. Michalski & K. J. Kurzydlowski

Authors
  1. K. Rożniatowski
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  2. A. Michalski
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  3. K. J. Kurzydlowski
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Rożniatowski, K., Michalski, A. & Kurzydlowski, K.J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method. J Mater Sci Lett 15, 317–319 (1996). https://doi.org/10.1007/BF00591649

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  • DOI: https://doi.org/10.1007/BF00591649

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