Skip to main content
Log in

Ripple formation during deep hole drilling in copper with ultrashort laser pulses

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Cross sections of deep holes produced by ultrashort laser pulses and showing a variety of microstructural formations are presented. After tens of thousands of 800 nm wavelength pulses, the walls of the holes show distinct ripples with a period of ∼300 nm. It is demonstrated that these ripples are the result of light interference effects. Indeed, the ripples are perpendicular to the electric field of the laser beam and their spacing scales with the laser wavelength. Additional fine ripples with spacing of ∼75 nm were also observed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. Bäuerle, Laser Processing and Chemistry, 3rd edn. (Springer, Berlin, 2000)

  2. A. Luft, U. Franz, A. Emsermann, J. Kaspar, Appl. Phys. A 63, 93 (1996)

    ADS  Google Scholar 

  3. D. Gómez, I. Goenaga, I. Lizuain, M. Ozaita, Opt. Eng. 44, 051105 (2005)

    Article  ADS  Google Scholar 

  4. M. Farsari, G. Filippidis, S. Zoppel, G.A. Reider, C. Fotakis, J. Micromech. Microeng. 15, 1786 (2005)

    Article  ADS  Google Scholar 

  5. M. Groenendijk, J. Meijer, Microstructuring using femtosecond pulsed laser ablation Proceedings of ICALEO 2005, Paper M408 (2005)

  6. D.C. Emmony, R.P. Howson, L.J. Willis, Appl. Phys. Lett. 23, 598 (1973)

    Article  ADS  Google Scholar 

  7. N. Tsukada, S. Sugata, Y. Mita, Appl. Phys. Lett. 42, 424 (1983)

    Article  ADS  Google Scholar 

  8. G.S. Zhou, P.M. Fauchet, A.E. Siegman, Phys. Rev. B 26, 5366 (1982)

    Article  ADS  Google Scholar 

  9. J.F. Young, J.S. Preston, H.M. van Driel, J.E. Sipe, Phys. Rev. B 27, 1155 (1983)

    Article  ADS  Google Scholar 

  10. N.R. Isenor, Appl. Phys. Lett. 31, 148 (1977)

    Article  ADS  Google Scholar 

  11. Y. Jee, M.F. Becker, R.M. Walser, J. Opt. Soc. Am. B 5, 648 (1988)

    Article  ADS  Google Scholar 

  12. P. Rudolph, W. Kautek, Thin Solid Films 453454, 537 (2004)

    Google Scholar 

  13. G. Dumitru, V. Romano, H.P. Weber, M. Sentis, W. Marine, Appl. Phys. A 74, 729 (2002)

    Article  ADS  Google Scholar 

  14. J. Bonse, S. Baudach, J. Krueger, W. Kautek, M. Lenzner, Appl. Phys. A 74, 19 (2002)

    Article  ADS  Google Scholar 

  15. J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)

    Article  ADS  Google Scholar 

  16. A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)

    Article  ADS  Google Scholar 

  17. N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 81, 933 (2005)

    Article  ADS  Google Scholar 

  18. T.H.R. Crawford, H.K. Haugen, Appl. Surf. Sci. 253, 4970 (2006)

    Article  ADS  Google Scholar 

  19. J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Phys. Rev. B 27, 1141 (1983)

    Article  ADS  Google Scholar 

  20. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997)

    Article  ADS  Google Scholar 

  21. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tünnermann, Appl. Phys. A 63, 109 (1996)

    ADS  Google Scholar 

  22. A.E. Wynne, B.C. Stuart, Appl. Phys. A 76, 373 (2003)

    Article  ADS  Google Scholar 

  23. A. Borowiec, H.K. Haugen, Appl. Phys. A 79, 521 (2004)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to A. Weck.

Additional information

PACS

62.20.Mk; 62.25.+g; 79.20.Ds

Rights and permissions

Reprints and permissions

About this article

Cite this article

Weck, A., Crawford, T., Wilkinson, D. et al. Ripple formation during deep hole drilling in copper with ultrashort laser pulses. Appl. Phys. A 89, 1001–1003 (2007). https://doi.org/10.1007/s00339-007-4203-6

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-007-4203-6

Keywords

Navigation