Abstract
Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting.
Similar content being viewed by others
References
Aura S, Franssila S (2010) Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures. 14th ICMSCLS, Groningen
Chen Q, Chen Q, Milanese D, Ferraris M (2009) Micro-structures fabrication on glasses for micro-fluidics by imprinting technique. Microsys Technol 15:1067–1107
Chen Q, Chen Q, Maccioni G, Ferrero S, Scaltrito L, Sacco A (2010) Fabrication of micro-structures on Nickel alloy by DPSS laser ablation technique for lab-on-chip applications. In: Proceedings of SPIE, optical trapping and optical micromanipulation, vol. 7762, p 776239
Chen Q, Chen Q, Maccioni G (2011) Fabrication of large-area microfluidics structures on glass by imprinting and diode-pumped solid state laser writing techniques. Microsyst Technol 17:1611–1619
Cheng J-Y, Yen M-H, Wei C-W et al (2005) Crack free direct writing on glass using a low–power UV laser in the manufacture of a microfluidic chip. J Micromech Microeng 15:1147–1156
Komori M, Uchiyama H, Takebe H et al (2008) Micro/nanoimprinting of glass under high temperature using a CVD diamond mold. J Micromech Microeng 18(1–9):065013
Kurnia W, Yoshino M (2009) Nano/micro structure fabrication of metal surfaces using the combination of nano plastic forming, coating and roller imprinting processes. J Micromech Microeng 19:125028
Marco CD, Suriano R (2012) Femtosecond laser fabrication and characterization of microchannels and waveguides in methacrylate-based polymers. Microsyst Technol 18:183–190
Martynova L, Locascio LE, Gaitan M et al (1997) Fabrication of plastic microfluid channels by imprinting methods. Anal Chem 69:4783–4789
Mathur A, Roy SS (2009) Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding. Curr Appl Phys 9:1199–1202
Sun Q, Saliminia A, Th´eberge F (2008) Microchannel fabrication in silica glass by femtosecond laser pulses with different central wavelengths. J Micromech Microeng 18:035–039
Takahashi M, Murakoshi Y, Maeda R, Hasegawa K (2006) Large area micro hot embossing of pyrex glass with GC mold machined by dicing. Microsys Technol 13:379–384
Watson WLM, Abdelgawad M (2006) Microcontact printing-based fabrication of digital microfluidic devices. Anal Chem 78:7877–7885
Whitesides GM (2006) The origins and the future of microfluidics. Nature 442(7101):368–373
Youn SW, Ueno A, Takahashi M, Maeda R (2009) A process of glassy carbon etching without the micro masking effect for the fabrication of a mold with a high-quality surface. Microelectron Eng 19(125010):1–8
Zhao X, Shin YC (2011) Femtosecond laser drilling of high-aspect ratio microchannels in glass. Appl Phys A 104:713–719
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Chen, Q., Maccioni, G., Chen, Q. et al. Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications. Microsyst Technol 19, 1185–1194 (2013). https://doi.org/10.1007/s00542-012-1718-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-012-1718-3