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Large-scale synthesis of monodisperse SiC nanoparticles with adjustable size, stoichiometric ratio and properties by fluidized bed chemical vapor deposition

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Abstract

A facile fluidized bed chemical vapor deposition method was proposed for the synthesis of monodisperse SiC nanoparticles by using the single precursor of hexamethyldisilane (HMDS). SiC nanoparticles with average particle size from 10 to 200 nm were obtained by controlling the temperature and the gas ratio. An experimental chemical vapor deposition phase diagram of SiC in the HMDS-Ar-H2 system was obtained and three regions of SiC-Si, SiC and SiC-C can be distinguished. The BET surface area and the photoluminescence properties of the SiC nanoparticles can be adjusted by changing the nanoparticle size. For the SiC nanospheres with free carbon, a novel hierarchical structure with 5 ~ 8 nm SiC nanoparticles embedded into the graphite matrix was obtained. The advantages of fluidized bed technology for the preparation of SiC nanoparticles were proposed based on the features of homogenous reaction zone, narrow temperature distribution, ultra-short reactant residence time and mass production.

Stoichiometric SiC nanoparticles with a diameter of 10 ~ 200 nm can be synthesized in mass production scale by a facile fluidized bed chemical vapor deposition method. An experimental chemical vapor deposition phase diagram of SiC in HMDS-Ar-H2 system was obtained under a different temperature and gas atmosphere and three regions of SiC-Si, SiC and SiC-C can be distinguished. BET surface area and photoluminescence properties of SiC nanoparticles can be adjusted based on different-size nanoparticles obtained. Novel hierarchical structure with 5 ~ 8 nm SiC nanoparticles embedded into the graphite matrix was obtained.

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Acknowledgments

This study was funded by the National Natural Science Foundation of China (Grant Nos.: 91634113, 51302148).

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The manuscript was written through the contributions of all the authors. All the authors have given approval to the final version of the manuscript.

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Authors and Affiliations

  1. Institute of Nuclear and New Energy Technology, Collaborative Innovation Center of Advanced Nuclear Energy Technology, Tsinghua University, Beijing, 100084, China

    Rongzheng Liu, Malin Liu & Jiaxing Chang

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  1. Rongzheng Liu
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  2. Malin Liu
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  3. Jiaxing Chang
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Correspondence to Malin Liu.

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Liu, R., Liu, M. & Chang, J. Large-scale synthesis of monodisperse SiC nanoparticles with adjustable size, stoichiometric ratio and properties by fluidized bed chemical vapor deposition. J Nanopart Res 19, 26 (2017). https://doi.org/10.1007/s11051-016-3737-y

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