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Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber

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Abstract

Poly-para-xylylene C (Parylene C) and Aluminium Nitride (AlN) multilayered thin films using a single chamber are proposed to achieve transparent passivation for organic light-emitting diodes (OLED). Parylene C-AlN multilayered thin films were obtained through a sequential deposition of Parylene C layers by an optimized chemical vapor deposition as well as deposition of AlN layers by radio frequency reactive sputtering within a short process time at room temperature. An OLED passivated with the thin film showed a significant extension of shelf-life of 400 h at 25 °C and 30% RH without any formation of dark spots during the shelf-life analysis, while a reference OLED without any passivation film was degraded within 24 h. In addition, the multilayered passivation films exhibited considerable optical transparency with transmittance greater than 85% in the visible range. This result demonstrates that Parylene C-AlN multilayered films can be successfully deposited within a short time at room temperature in a single chamber for passivation applications in transparent flexible OLEDs and other organic electronic devices.

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Acknowledgements

This research was supported by Collabo R&D between Industry, Academy, and Research Institute funded Korea Ministry of SMEs and Startups in 2020 (S2737207), the research fund of Hanbat National University in 2016 and Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2018R1A6A1A03026005).

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Authors and Affiliations

  1. Department of Electronic Engineering, Hanbat National University, 125 Dongseo-daero, Yuseong-gu, Daejeon, 34158, Republic of Korea

    Akpeko Gasonoo & Yoonseuk Choi

  2. Department of Materials Science and Engineering, Inha University, 100 Inha-ro, Michuhol-gu, Incheon, 22212, Republic of Korea

    Jeong-Hwan Lee

  3. Department of Creative Convergence Engineering, Hanbat National University, 125 Dongseo-daero, Yuseong-gu, Daejeon, 34158, Republic of Korea

    Young-Ji Lim, Seung-Hun Lee & Jae-Hyun Lee

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  1. Akpeko Gasonoo
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Correspondence to Yoonseuk Choi or Jae-Hyun Lee.

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Akpeko Gasonoo and Jeong-Hwan Lee are equally contributed.

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Gasonoo, A., Lee, JH., Lim, YJ. et al. Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber. Electron. Mater. Lett. 16, 466–472 (2020). https://doi.org/10.1007/s13391-020-00236-x

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