Abstract
Based on piezoelectric ceramics (PZT), a feedback control method for compensating beam drift is proposed in this paper. The actuator can control the pitch and yaw angle of the light simultaneously, and its structure is very simple. The angular drift of laser is detected and separated in the designed optical path. The influence of interference noise is suppressed by moving average filter, and then, the beam drift is compensated through controlling mirror by PZT to suppress its influence on the stability of alignment measurement. The real-time control is realized by using proportional–integral–derivative (PID). The method of relay feedback is used to realize automatic tuning of PID parameters. Compensated by this method, the drift of quadrant photodiode detector (QPD1) in X and Y directions was reduced by 87 and 44%, respectively; that of QPD2 was reduced by 29.7 and 28.6%, respectively; and that of QPD3 was reduced by 78 and 70.3%, respectively. So the laser angular drift in the measuring optical path is well suppressed.
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Acknowledgements
The authors gratefully acknowledge the financial support of China National Key Research and Development Plan Project (No. 2017YFF0204801) and Special Fundamental Research Funds for Central Universities of China (No. DUT17GF214).
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Liu, S., Zhang, S., Huang, Y. et al. The Method for Restraining Laser Drift Based on Controlling Mirror. Nanomanuf Metrol 1, 58–65 (2018). https://doi.org/10.1007/s41871-018-0009-8
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DOI: https://doi.org/10.1007/s41871-018-0009-8