Skip to main content
Log in

Simulating the Effect of Quartz Sensor Thermal Deformation on Q-Flex Accelerometer Zero Shift

  • Published:
Gyroscopy and Navigation Aims and scope Submit manuscript

Abstract—In the paper, simulation is used to study the thermal deformation of Q-flex accelerometer quartz sensitive element (SE) with technological geometrical deviations of elastic beams with conductors within the operation temperature range. It has been shown that the largest bending moment in the SE appears when conductors from the front and back sides of elastic beam have different thickness and width. A method for static thermal tests simulation has been developed, which allows estimation of accelerometer zero shift with account for the geometrical imperfections of SE elastic beams. It has been revealed that the thermal hysteresis and non-repeatability of accelerometer zero shift are due to the plastic deformation of conductors under near-boundary temperature loads. A SE modification with loose conductors has been developed, which, according to the simulation results, improves the thermal coefficient, hysteresis, and repeatability of zero shift.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.
Fig. 8.
Fig. 9.
Fig. 10.
Fig. 11.
Fig. 12.

Similar content being viewed by others

REFERENCES

  1. Jacobs, E.D., Patent US3702073 (A), G01P15/13, Accelerometer; Sundstrand Data Control Inc. 07.11.1972.

  2. Gao, J., Zhang, K, and Yang, H.-B., Temperature characteristics and error compensation for quartz flexible accelerometer, International Journal of Automation and Computing, October 2015, vol. 12, no. 5, pp. 540−550.https://doi.org/10.1007/s11633-015-0899-5

    Article  Google Scholar 

  3. Minkin, A.M., A quartz glass sensor forming technology by chemical etching using texturized molybdenium coating, Cand. Sci. Dissertation, Perm National Research Polytechnic University, Perm, 2020.

  4. Yang, W., Fang, B., Tang, Y.Y., and Qin, X., A temperature compensation model for low cost quartz accelerometer and its application in tilt sensing, Mathematical Problems and Engineering, 2016, vol. 2016, article ID 2950376. https://doi.org/10.1155/2016/2950376

    Article  Google Scholar 

  5. Birleanu, C., Pustan, M., Merie, V., Müller, R., Voicu, R., Baracu, A., and Craciun, S., Temperature effect on the mechanical properties of gold nano films with different thickness, IOP Conference Series: Materials Science and Engineering, 2016, vol. 147, no. 012021. https://doi.org/10.1088/1757-899X/147/1/012021

  6. Hodge, T., Bidstrup-Allen, S., and Kohl, P., Stress in thin film metallization, IEEE Transactions on Components, Packaging and Manufacturing Technology, June 1997, vol. 20, no. 2, pp. 241–250.

    Article  Google Scholar 

  7. Ghazi, N.E., Investigation of plastic strain recovery and creep in thin film nanocrystalline metals, Graduate School of Arts and Science, Columbia university, 2014.

  8. Baek, C.-W., Kim, J.-M., Kim, Y.-K., Kim, J.H., Lee, H.J., and Han, S.W., Mechanical characterization of gold thin films based on strip bending and nanoindentation test for MEMS/NEMS application, Sensors and Materials, 2005, vol. 17, no. 5, pp. 277– 288.

    Google Scholar 

  9. Pamato, M.G., Wood, I.G., Dobson, D.P., Hunta, S.A., and Vočadlo, L., The thermal expansion of gold: Point defect concentrations and pre-melting in face-centered cubic metal, Journal of Applied Crystallography, 2018, vol. 51, pp. 470–480.https://doi.org/10.1107/S1600576718002248

    Article  Google Scholar 

  10. Glass: Selected Properties and Crystallization, Schmelzer, J.W.P., Ed., Berlin-Boston: Walter de Gruyter GmbH, 2014. https://doi.org/10.1515/9783110298581

    Book  Google Scholar 

  11. Denisov, S.Yu. and Akilin, V.I., Technological methods for improving the accuracy of quartz accelerometers, Navigatsiya i upravlenie letatel’nymi apparatami, 2016, no. 15, pp. 17–31.

  12. Hanson, R.A. and Atherton, K.W., Pat. US4400979 (A), G01L1/00; G01L1/14; G01L1/26; G01P15/13, Force transducer flexure with conductors on surfaces in the neutral bending plane, Sundstrand Data Control Inc., 30.08.1983.

  13. Konovalov, S.F., Mayorov, D.V., Ponomarev, Yu.A., Chulkov, V.E., Semenov, A.E., and Kharlamov, M.S., Patent RU2731652 (C1), G01P15/135, Pendulum force-rebalance accelerometer, № RU20190107343; Byulleten, 2020, no. 25.

  14. Konovalov, S.F., Mayorov, D.V., Semenov, A.E. Ponomarev, Yu.A., Chulkov, V.E., Malykhin, A.A., Kharlamov, M.S., and Malykhin, D.A., Temperature drift and instability of a zero signal of pendulum servo accelerometer, 27th St. Petersburg International Conference on Integrated Navigation Systems, St. Petersburg: Elektropribor, 2020.

  15. Bom, S.J., Parameter optimization and operation mode modeling for Q-flex and Si-flex force-rebalance accelerometers, Cand. Sci. Dissertation, Moscow, 2012.

  16. Luchkin, A.G., Thermal mode of applying thin film coatings to polymers by sputter deposition, Vestnik Kazanskogo tekhnologicheskogo universiteta, 2011, vol. 16, 2011. pp. 121−125.

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to M. S. Kharlamov.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Barbin, E.S., Kozlov, D.V., Konovalov, S.F. et al. Simulating the Effect of Quartz Sensor Thermal Deformation on Q-Flex Accelerometer Zero Shift. Gyroscopy Navig. 13, 36–43 (2022). https://doi.org/10.1134/S2075108722010035

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S2075108722010035

Keywords:

Navigation