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Table of contents (4 chapters)
Keywords
Bibliographic Information
Book Title: Vakuumbeschichtung
Book Subtitle: Anlagenautomatisierung — Meß- und Analysentechnik
Editors: Gerhard Kienel
Series Title: VDI-Buch
DOI: https://doi.org/10.1007/978-3-642-57904-2
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1994
Hardcover ISBN: 978-3-540-62269-7Published: 19 May 1994
Softcover ISBN: 978-3-642-63511-3Published: 30 October 2012
eBook ISBN: 978-3-642-57904-2Published: 07 March 2013
Series ISSN: 2512-5281
Series E-ISSN: 2512-529X
Edition Number: 1
Number of Pages: XII, 368
Topics: Manufacturing, Machines, Tools, Processes, Industrial Chemistry/Chemical Engineering, Characterization and Evaluation of Materials, Surfaces and Interfaces, Thin Films