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Laser-Assisted Microtechnology

  • Book
  • © 1998
  • Latest edition

Overview

Authors:
  1. Simeon M. Metev

    1. BIAS Bremen Institute of Applied Beam Technology, Bremen, Germany

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    You can also search for this author in PubMed   Google Scholar

  2. Vadim P. Veiko

    1. IFMO Institute of Fine Mechanics and Optics, St. Petersburg, Russia

    View author publications

    You can also search for this author in PubMed   Google Scholar

  • Ãœbersicht über die Laser-Anwendungen in der Mikro-
  • Nanotechnologie mit praktischen Ergebnissen.

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 19)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-XII
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  2. Introduction

    • Simeon M. Metev, Vadim P. Veiko
    Pages 1-5

  3. Laser- Based Equipment for Microtechnology

    • Simeon M. Metev, Vadim P. Veiko
    Pages 6-33

  4. Laser Micromachining of Thin Films

    • Simeon M. Metev, Vadim P. Veiko
    Pages 34-99

  5. Local Laser- Induced Heat Treatment

    • Simeon M. Metev, Vadim P. Veiko
    Pages 100-131

  6. Laser Melting and Microwelding

    • Simeon M. Metev, Vadim P. Veiko
    Pages 132-156

  7. Laser Microshaping

    • Simeon M. Metev, Vadim P. Veiko
    Pages 157-186

  8. Maskless Laser Micropatterning

    • Simeon M. Metev, Vadim P. Veiko
    Pages 187-227

  9. Pulsed Laser- Plasma Deposition of Thin Films, and Film Structures

    • Simeon M. Metev, Vadim P. Veiko
    Pages 228-246

  10. Back Matter

    Pages 247-273
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Keywords

About this book

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

Authors and Affiliations

  • BIAS Bremen Institute of Applied Beam Technology, Bremen, Germany

    Simeon M. Metev

  • IFMO Institute of Fine Mechanics and Optics, St. Petersburg, Russia

    Vadim P. Veiko

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