Abstract
Starting with the introduction of electron transport in conventional p−n junction and field-effect transistor, we first discuss semiclassical versus quantum mechanical considerations about carrier transport in solids after which we focus on the tunneling of an electron wave through a potential barrier in resonant tunneling diode and heterostructure barrier varactor. Quantum mechanical engineering of nano-scale transistors, including high-electron-mobility transistor and single-electron transistor, are then presented for higher carrier mobility and better current-voltage control.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Selberherr S (1984) Analysis and simulation of semiconductor devices. Springer, Wien, p 8
Esaki L (1958) New phenomenon in narrow germanium p−n junctions. Phys Rev 109:603–604
Capasso F (ed) (1990) Physics of quantum electron devices. Springer, Berlin
Esaki L (1985) Semiconductor superlattices and quantum wells. In: Chadi JD, Harrison WA (eds) Proc 17th int conf on the physics of semiconductors, San Francisco, 1984. Springer, New York, pp 473–483
Heiblum M, Nathan MI, Thomas DC, Knoedler CM (1985) Direct observation of ballistic transport in GaAs. Phys Rev Lett 55:2200–2203
Bonnefoi AR, Chow DH, McGill TC (1985) Inverted base-collector tunnel transistors. Appl Phys Lett 47:888–890
Luryi S, Capasso F (1985) Resonant tunneling of two-dimensional electrons through a quantum wire: a negative transconductance device. Appl Phys Lett 47:1347–1349
Yoshimura H, Schulman JN, Sakaki H (1990) Charge accumulation in a double-barrier resonant-tunneling structure studied by photoluminescence and photoluminescence-excitation spectroscopy. Phys Rev Lett 64:2422–2425
Luryi S (1985) Frequency limit of double-barrier resonant-tunneling oscillators. Appl Phys Lett 47:490–492
Sollner TCLG, Brown ER, Goodhue WD, Le HQ (1990) In: Capasso F (ed) Physics of quantum electron devices. Springer, Berlin, p 145
Goldman VJ, Tsui DC, Cunningham JE (1987) Observation of intrinsic bistability in resonant-tunneling structures. Phys Rev Lett 58:1256–1259
Sollner TCLG, Goldman VJ, Cunningham JE (1987) Comment on ‘Observation of intrinsic bistability in resonant-tunneling structures’. Phys Rev Lett 59:1622–1623
Boric O, Tolmunen TJ, Kollberg E, Frerking MA (1992) Anomalous capacitance of quantum well double-barrier diodes. Int J Infrared Millim Waves 13:799–814
Sollner TCLG, Goodhue WD, Tannenwald PE, Parker CD, Peck DD (1983) Resonant tunneling through quantum wells at frequencies up to 2.5 THz. Appl Phys Lett 43:588–590
Hou Y, Wang W-P, Li N, Lu W, Fu Y (2008) Effects of series and parallel resistances on the current-voltage characteristics of small-area air-bridge resonant tunneling diode. J Appl Phys 104, 074508
Zhu B, Chao KA (1987) Phonon modes and Raman scattering in GaAs/Ga1−x Al x As. Phys Rev B 36:4906–4914
Goldman VJ, Tsui DC, Cunningham JE (1987) Evidence for LO-phonon-emission-assisted tunneling in double-barrier heterostructures. Phys Rev B 36:7635–7637
Wingreen NS, Jacobsen KW, Wilkins JW (1988) Resonant tunneling with electron-phonon interaction: an exactly solvable model. Phys Rev Lett 61:1396–1399
Rydberg A, Grönqvist H, Kollberg E (1990) Millimeter- and submillimeter-wave multipliers using quantum-barrier-varactor (QBV) diodes. IEEE Electron Device Lett 11:373–375
Kollberg E, Stake J, Dillner L (1996) Heterostructure barrier varactors at submillimeter waves. Philos Trans R Soc A, Math Phys Eng Sci 354:2383–2398
Reddy VK, Neikirk DP (1993) High breakdown voltage AlAs/InGaAs quantum barrier varactor diodes. Electron Lett 29:464–466
Hui S, Zhang WM, Domier CW, Luhmann NC Jr, Sjogren LB, Liu XLH (1995) Novel concept for improved nonlinear transmission line performance. IEEE Trans Microw Theory Tech 43:780–789
Lieneweg U, Hancock BR, Maserjian J (1987) Barrier-intrinsic-N+ (BIN) diodes for near-millimeter wave generation. In: Conference digest: 20th int conf infrared and millimeter waves. IEEE Press, New York, pp 6–7
Liu HXL, Qin XH, Sjogren LB, Chumg E, Domier CW, Luhmann NC Jr (1992) Monolithic high-power millimeter-wave quasi-optical frequency multiplier arrays using quantum barrier devices. IEEE Trans Electron Devices 39:2668
Rahal A, Bosisio RG, Boch E, Rogers C, Ovey J (1996) Planar V-band frequency tripler for indoor communication systems. Proc SPIE 2842:209–214
Batey J, Wright SL (1986) Energy band alignment in GaAs:(Al, Ga)As heterostructures: the dependence on alloy composition. J Appl Phys 59:200–209
Landheer D, Liu HC, Buchanan M, Stoner R (1989) Tunneling through AlAs barriers: Gamma-X transfer current. Appl Phys Lett 54:1784–1786
Krishnamurthi K, Nilsen SM, Harrison RG (1994) GaAs single-barrier varactors for millimeter-wave triplers: guidelines for enhanced performance. IEEE Trans Microw Theory Tech 42:2512–2516
Dillner L, Stake J, Kollberg E (1997) Analysis of symmetric varactor frequency multipliers. Microw Opt Technol Lett 15:26–29
Stern F, Howard W (1967) Properties of semiconductor surface inversion layers in electric quantum limit. Phys Rev 163:816–835
Dingle R, Störmer HL, Gossard AC, Wiegmann W (1978) Electron mobilities in modulation-doped semiconductor superlattices. Appl Phys Lett 33:665–667
Hess K (1979) Impurity and phonon scattering in layered structures. Appl Phys Lett 35:484–486
Hiyamizu S, Saito J, Nanbu K, Ishikawa T (1983) Improved electron mobility higher than 106 cm2/Vs in selectively doped GaAs/N-AlGaAs heterostructures grown by MBE. Jpn J Appl Phys 22:L609–L611
Mimura T, Hiyamizu S, Fujii T, Nanbu K (1980) A new field-effect transistor with selectively doped GaAs/n-Al x Ga1−x As heterojunctions. Jpn J Appl Phys 19:L225–L227
Walukiewicz W, Ruda HE, Lagowski J, Gatos HC (1984) Electron mobility limits in a two-dimensional electron gas: GaAs-GaAlAs heterostructures. Phys Rev B 29:4818–4820
Walukiewicz W, Ruda HE, Lagowski J, Gatos HC (1984) Electron mobility in modulation-doped heterostructures. Phys Rev B 30:4571–4582
Yokoyama K, Hess K (1986) Monte Carlo study of electronic transport in Al1−x Ga x As/GaAs single-well heterostructures. Phys Rev B 33:5595–5606
Hirakawa K, Sakaki H (1986) Mobility of the two-dimensional electron gas at selectively doped n-type Al x Ga1−x As/GaAs heterojunctions with controlled electron concentrations. Phys Rev B 33:8291–8303
Price PJ (1981) Two-dimensional electron transport in semiconductor layers. I. Phonon scattering. Ann Phys 133:217–239
Zeindl HP, Wegehaupt T, Eisele I, Oppolzer H, Reisinger H, Tempel G, Koch F (1987) Growth and characterization of a delta-function doping layer in Si. Appl Phys Lett 50:1164–1166
Ni W-X, Hansson GV, Sundgren J-E, Hultman L, Wallenberg LR, Yao J-Y, Markert LC, Greene JE (1992) Delta-function-shaped Sb-doping profiles in Si(001) obtained using a low-energy accelerated-ion source during molecular-beam epitaxy. Phys Rev B 46:7551–7558
Sze SM (ed) (1990) High-speed semiconductor devices. Wiley, New York
Manasreh MO (ed) (1993) Semiconductor quantum wells and superlattices for long-wavelength infrared detectors. Artech House, Boston
Iwai H (1993) CMOS device architecture and technology for the 0.25 micron to 0.025 micron generations. In: Borel J, Gentil P, Noblance JP, Nouailhat A, Verdone M (eds) Proceedings of the 23rd European solid state device research conference, Grenoble, France, 1993. Frontieres, Gif-sur-Yvette, pp 513–520
Chandrakasan AP, Sheng S, Brodersen RW (1992) Low-power CMOS digital design. IEEE J Solid-State Circuits 27:473–484
Haydock R, Heine V, Kelly MJ (1972) Electronic structure based on the local atomic environment for tight-binding bands. J Phys C, Solid State Phys 5:2845–2858
Fu Y, Xu W, Zheng Z-B (1987) Impurity induced vibrations in light doped silicon. Solid State Commun 62:163–167
Friedel J (1954) Electronic structure of primary solid solutions in metals. Adv Phys 3:446–507
Kittel C (1963) Quantum theory of solids. Wiley, New York, p 339
Heine V, Weaire D (1970) Pseudopotential theory of cohesion and structure. Solid State Phys 24:249–463
Ono M, Saito M, Yoshitomi T, Fiegna C, Ohguro T, Iwai H (1993) Sub-50 nm gate length n-MOSFETs with 10 nm phosphorus source and drain junctions. In: Proceeding of the international electron devices meeting, pp 119–122
Ono M, Saito M, Yoshitomi T, Fiegna C, Ohguro T, Iwai H (1995) A 40 nm gate length n-MOSFET. IEEE Trans Electron Devices 42:1822–1830
Han J, Ferry D, Newman P (1990) Ultra-submicrometer-gate AlGaAs/GaAs HEMTs. IEEE Electron Device Lett 11:209–211
Hashizume T, Okada H, Hasegawa H (1996) Quantum transport in a Schotty in-plane-gate controlled GaAs/AlGaAs quantum well wires. Physica B 227:42–45
Omura Y, Kurihara K, Takahashi Y, Ishiyama T, Nakajima Y, Izumi K (1997) 50-nm channel nMOSFET/SIMOX with an ultrathin 2- or 6-nm thick silicon layer and their significant features of operations. IEEE Electron Device Lett 18:190–193
Pelouard JL, Teissier R, Matine N, Pardo F (1997) Dynamic behaviour of the metal heterojunction bipolar transistor. In: International conference on indium phosphide and related materials. IEEE Press, New York, pp 169–172
Ando T (1996) Mesoscopic transport in low dimensional systems. In: 23rd international conference on the physics of semiconductors. World Scientific, Singapore, pp 59–68
Dollfus P (1997) Si/Si1−x Ge x heterostructures: electron transport and field effect transistor operating using Monte Carlo simulation. J Appl Phys 82:3911–3916
Lake R, Klimeck G, Bowen RC, Jovanovic D (1997) Single and multiband of quantum electron transport through layered semiconductor devices. J Appl Phys 81:7845–7869
Vasileska D, Eldridge T, Ferry DK (1996) Quantum transport: silicon inversion layers and InAlAs-InGaAs heterostructures. J Vac Sci Technol B 14:2780–2785
Nedjalkov M, Dimov I, Bordone P, Brunetti R, Jacoboni C (1997) Using the Wigner function for quantum transport in device simulation. Math Comput Model 25:33–53
Fu Y, Mu Y, Willander M (1996) Quantum ballistic transport in a dual-gate Si transistor. IEEE Trans Electron Devices 43:2030–2032
Madhukar A (1990) The nature of molecular beam epitaxy and consequences for quantum microstructures. In: Capasso F (ed) Physics of quantum electron devices. Springer, Berlin, Chap. 2
Ando T, Fowler AB, Stern F (1982) Electronic properties of two-dimensional systems. Rev Mod Phys 54:437–672
Fu Y, Willander M (1991) Lateral-nonuniformity effect on the I-V spectrum in a double-barrier resonant-tunneling structure. Phys Rev B 44:13631–13634
Fu Y, Willander M, Stake J, Dillner L, Kollberg EL (2000) Carrier conduction through the quantum barrier region in a heterostructure barrier varactor induced by an AC bias. Superlattices Microstruct 28:135–141
Bohr M (2001) MOS transistor scaling challenges. In: Proceedings of the international symposium ULSI process integration II. ECS proceedings, vol 2001-2, pp 463–473
Lindert N, Chang L, Choi Y-K, Anderson EH, Lee W-C, King T-J, Boker J, Hu C (2001) Sub-60-nm quasi-planar FinFETs fabricated using a simplified process. IEEE Electron Device Lett 22:487–489
Celler GK, Cristoloveanu S (2003) Frontiers of silicon-on-insulator. J Appl Phys 93:4955–4978
Jurczak M, Skotnicki T, Paoli M, Tormen B, Martins J, Regolini JL, Dutartre D, Ribot P, Lenoble D, Pantel R, Monfray S (2000) Silicon-On-Nothing (SON)—an innovative process for advanced CMOS. IEEE Trans Electron Devices 47:2179–2187
Plummer JD (2000) Silicon MOSFETs (conventional and non-traditional) at the scaling limit. In: Proc of device research conference, pp 3–7
Schultz T, Rosner W, Risch L, Korbel A, Langmann U (2001) Short-channel vertical sidewall MOSFETs. IEEE Trans Electron Devices 48:1783–1788
Simmons JA, Blount MA, Moon JS, Baca WE, Reno Jl, Hafich MJ (1997) Unipolar complementary bistable memories using gate-controlled negative differential resistance in a 2D-2D quantum tunneling transistor. In: Electron devices meeting, IEDM technical digest, pp. 755–758 (cat no 97CH36103)
Matsuoka H, Ichiguchi T, Yoshimura T, Takeda E (1994) Coulomb blockade in the inversion layer of a Si metal-oxide-semiconductor field-effect transistor with a dual-gate structure. Appl Phys Lett 64:586–588
Lauhon LJ, Gudiksen MS, Wang D, Lieber CM (2002) Epitaxial core-shell and core-multishell nanowire heterostructures. Nature 420:57–61
Iwai H CMOS Downsizing toward sub-10 nm. www.iwai.ae.titech.ac.jp/pdf/iwaironbun/ulis03.pdf
Monfray S, Souifi A, Boeuf F, Ortolland C, Poncet A, Militaru L, Chanemougame D, Skotnicki T (2003) Coulomb-blockade in nanometric Si-film silicon-on-nothing (SON) MOSFETs. IEEE Trans Nanotechnol 2:295–300
Peters MG, den Hartog SG, Dijkhuis JI, Buyk OJA, Molenkamp LW (1998) Single electron tunneling and suppression of short-channel effects in submicron silicon transistors. J Appl Phys 84:5052–5056
Ionescu AM, Declercq MJ, Mahapatra S, Banerjee K, Gautier J (2002) Few electron devices: towards hybrid CMOS-SET integrated circuits. In: Proceedings of the 39th conference on design automation, New Orleans, Louisiana, USA, pp 88–93
Ishikuro H, Hiramoto T (1997) Energy spectrum of the quantum-dot in a Si single-electron-device. In: 55th annual device research conference digest, Fort Collins, CO, USA, 23–25, June 1997, pp 84–85 (cat no 97TH8279)
Ishikuro H, Hiramoto T (1997) Quantum mechanical effects in the silicon quantum dot in a single-electron transistor. Appl Phys Lett 71:3691–3693
Ishikuro H, Hiramoto T (1999) Fabrication of nano-scale point contact metal-oxide-semiconductor field-effect-transistors using micrometer-scale design rule. Jpn J Appl Phys 38:396–398
Saitoh M, Hiramoto T (2001) Suppression of series parasitic resistance and observation of quantum effects in a silicon single-electron transistor. In: Proceedings of the 2001 1st IEEE conference on nanotechnology, IEEE-NANO 2001, Maui, HI, USA, 28–30 October 2001, pp 243–247 (cat no 01EX516)
Saitoh M, Saito T, Inukai T, Hiramoto T (2001) Transport spectroscopy of the ultrasmall silicon quantum dot in a single-electron transistor. Appl Phys Lett 79:2025–2027
Saitoh M, Takahashi N, Ishikuro H, Hiramoto T (2001) Large electron addition energy above 250 meV in a silicon quantum dot in a single-electron transistor. Jpn J Appl Phys 40:2010–2012
Wang TH, Li HW, Zhou JM (2001) Si single-electron transistors with in-plane point-contact metal gates. Appl Phys Lett 78:2160–2162
Dutta A, Kimura M, Honda Y, Otobe N, Itoh A, Oda S (1997) Fabrication and electrical characteristics of single electron tunneling devices based on Si quantum dots prepared by plasma processing. Jpn J Appl Phys 36:4038–4041
Dutta A, Lee SP, Hayafune Y, Hatatani S, Oda S (2000) Single-electron tunneling devices based on silicon quantum dots fabricated by plasma process. Jpn J Appl Phys 39:264–267
Dutta A, Lee SP, Hatatani S, Oda S (1999) Silicon-based single-electron memory using a multiple-tunnel junction fabricated by electron-beam direct writing. Appl Phys Lett 75:1422–1424
Fu Y, Willander M, Dutta A, Oda S (2000) The gate bias vs. the number of electrons confined in Si dot based single electron transistor. Proc SPIE 3975(1–2):1027–1032
Dutta A, Oda S, Fu Y, Willander M (2000) Electron transport in nanocrystalline Si based single electron transistors. Jpn J Appl Phys 39:4647–4650
Fu Y, Willander M, Dutta A, Oda S (2000) Carrier conduction in Si-nanocrystal-based single-electron transistor—I. Effect of gate bias. Superlattices Microstruct 28:177–187
Fu Y, Willander M, Dutta A, Oda S (2000) Carrier conduction in Si-nanocrystal-based single-electron transistor—II. Effect of drain bias. Superlattices Microstruct 28:189–198
Dutta A, Hayafune Y, Oda S (2000) Single electron memory devices based on plasma-derived silicon nanocrystals. Jpn J Appl Phys 39:L855–L857
Hutchby JA, Bourianoff GI, Zhirnov VV, Brewer JE (2002) Extending the road beyond CMOS. IEEE Circuits Devices Mag 18:28–41
Montemerlo MS, Love JC, Opiteck GJ, Goldhaber-Gordon D, Ellenbogen JC (1996) Technologies and designs for electronic nanocomputers. MITRE, McLean
Goldhaber-Gordon D, Montemerlo MS, Love JC, Opiteck GJ, Ellenbogen JC (1997) Overview of nanoelectronic devices. Proc IEEE 85:521–540
Toffoli T, Margolus N (1987) Cellular automata machines: a new environment for modeling. MIT, Cambridge
Tanamoto T, Katoh R (1996) The possibility of higher temperature operation in quantum cellular automata (QCA). IEICE Trans Electron E79-C:1550–1556
Lent CS, Tougaw PD, Porod W (1993) Bistable saturation in coupled quantum dots for quantum cellular automata. Appl Phys Lett 62:714–716
Lent CC, Tougaw PD, Porod W, Bernstein GH (1993) Quantum cellular automata. Nanotechnology 4:49–57
Hu J, Ouyang M, Yang P, Lieber CM (1999) Controlled growth and electrical properties of heterojunctions of carbon nanotubes and silicon nanowires. Nature 399:48–51
Johnson AT (1999) Electronics of single-wall carbon nanotubes. In: Wuorinen JH (ed) IEEE international solid-state circuits conference, ISSCC. Digest of technical papers, San Francisco, CA, USA, 15–17 February 1999, 1st edn. pp 210–211
Kong J, Zhou C, Yenilmez E, Dai H (2000) Alkaline metal-doped n-type semiconducting nanotubes as quantum dots. Appl Phys Lett 77:3977–3979
Yao Z, Postma HWC, Balents L, Dekker C (1999) Carbon nanotube intramolecular junctions. Nature 402:273–276
Matsumoto K, Gotoh K (2001) Nano-processing using carbon nano tube probes and its device applications. In: International semiconductor device research symposium. Symposium proceedings, Washington, DC, USA, 5–7 December 2001, pp 354–357 (cat no 01EX497)
Kanda A, Ootuka Y, Tsukagoshi K, Aoyagi Y (2001) Electron transport in metal/multiwall carbon nanotube/metal structures (metal = Ti or Pt/Au). Appl Phys Lett 79:1354–1356
Roschier L, Penttila J, Martin M, Hakonen P, Paalanen M, Tapper U, Kauppinen EI, Journet C, Bernier P (1999) Single-electron transistor made of multiwalled carbon nanotube using scanning probe manipulation. Appl Phys Lett 75:728–730
Kong J, Cao J, Dai H, Anderson E (2002) Chemical profiling of single nanotubes: intramolecular p-n-p junctions and on-tube single-electron transistors. Appl Phys Lett 80:73–75
Miura N, Numaguchi T, Yamada A, Konagai M, Shirakashi J-I (1997) Single-electron tunneling through amorphous carbon dots array. Jpn J Appl Phys 36:1619–1621
Wada Y (1995) A proposal of atom/molecule switching devices. Optoelectron, Dev Technol 10:205–220
Ahmad S (1998) Semiconductor switching devices-future trends. Def Sci J (India) 48:45–59
Tanamoto T (2000) Quantum gates by coupled quantum dots and measurement procedure in field-effect-transistor structure. Fortschr Phys 48:1005–1021
Schon JH (2001) High mobilities in organic semiconductors: basic science and technology. Synth Met 122:157–160
Schon JH, Kloc Ch, Batlogg B (2001) Ambipolar organic devices for complementary logic. Synth Met 122:195–197
Okada H, Hasegawa H (2001) Novel single electron memory device using metal nano-dots and Schottky in-plane gate quantum wire transistors. Jpn J Appl Phys 40:2797–2800
Ahlers F-J, Krupenin VA, Lotkhov SV, Niemeyer J, Presnov DE, Scherer H, Weimann T, Wolf H, Zorin AB (1996) Investigation of the offset charge noise in single electron tunneling devices. In: Braun A (ed) Conference on precision electromagnetic measurements digest, Braunschweig, Germany, 17–21 June 1996, pp 507–508 (cat no 96CH35956)
Krupenin VA, Presnov DE, Savvateev MN (1998) Noise in Al single electron transistors of stacked design. J Appl Phys 84:3212–3215
Furlan M, Heinzel T, Jeanneret B, Lotkhov SV (2000) Coulomb blockade peak statistics influenced by background charge configuration. J Low Temp Phys 118:297–306
Klein DL, Roth R, Lim AKL, Alivisatos AP, McEuen PL (1997) A single-electron transistor made from a cadmium selenide nanocrystal. Nature 389:699–701
Altmeyer S, Hamidi A, Spangenberg B, Kurz H (1997) 77 K single electron transistors fabricated with 0.1 μm technology. J Appl Phys 81:8118–8120
Pettersson J, Wahlgren P, Delsing P, Haviland DB, Claeson T, Rorsman N, Zirath H (1996) Extending the high-frequency limit of a single-electron transistor by on-chip impedance transformation. Phys Rev B 53:R13272–R13274
Visscher EH, Verbrugh SM, Lindeman J, Hadley P, Mooij JE (1995) Fabrication of multilayer single-electron tunneling devices. Appl Phys Lett 66:305–307
Ford EM, Ahmed H (1998) Fabrication of self-aligned metallic Coulomb blockade devices on Si nanowires. J Vac Sci Technol B 16:3800–3803
Weimann T, Scherer H, Wolf H, Krupenin VA, Niemeyer J (1998) A new technology for metallic multilayer single electron tunneling devices. Microelectron Eng 41–42:559–562
Matsumoto K (1998) Room temperature single electron transistor made by STM/AFM nano-oxidation process. In: Hou HQ, Sah RE, Pearton SJ, Ren F, Wada K (eds) Proceedings of the symposium on light emitting devices for optoelectronic applications and twenty-eighth state-of-the-art program on compound semiconductors, San Diego, CA, USA, 3–8 May 1998, pp 68–77
Kikutani T, Aoki N, Hong CU, Hori H, Yamada S (1998) Quantum transport in ferromagnetic dot structure embedded in semiconductor quantum wires. Physica B 249–251:513–517
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Fu, Y. (2014). Electronic Quantum Devices. In: Physical Models of Semiconductor Quantum Devices. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-7174-1_4
Download citation
DOI: https://doi.org/10.1007/978-94-007-7174-1_4
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-007-7173-4
Online ISBN: 978-94-007-7174-1
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)