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Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure

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Abstract

We investigated structural and characteristic changes in thin HfO2 films (<10 nm) by varying their thicknesses and also examined their influence on the properties of Pt/SrBi2Ta2O9/HfO2/Si metal/ferroelectric/insulator/semiconductor (MFIS) structures. HfO2 films with different thicknesses were found to exhibit rather distinct characteristics and to profoundly affect the properties of the fabricated MFIS capacitor. We found that, when employing 3.2-nm-thick HfO2 as the buffer layer, the MFIS capacitor showed good memory performance at low operation voltage. However, this study demonstrated that some of the HfO2 limited its application in MFIS memory, even though it is the most promising alternative gate dielectric material.

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Acknowledgment

This study was supported by the National Science Council, Republic of China (Contract No. NSC 96-2221-E390-017).

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Authors and Affiliations

  1. Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung, 811, Taiwan, Republic of China

    Ching-Chich Leu

  2. Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30043, Taiwan, Republic of China

    Chen-Han Lin

  3. Department of Electronics Engineering, National Chiao Tung University, Hsinchu, 30050, Taiwan, Republic of China

    Chao-Hsin Chien

  4. National Nano Device Laboratories, Hsinchu, 30043, Taiwan, Republic of China

    Ming-Jui Yang

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  1. Ching-Chich Leu
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Correspondence to Ching-Chich Leu.

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Leu, CC., Lin, CH., Chien, CH. et al. Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure. Journal of Materials Research 23, 2023–2032 (2008). https://doi.org/10.1557/JMR.2008.0248

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  • DOI: https://doi.org/10.1557/JMR.2008.0248

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