Abstract
The low energy electron diffraction (LEED) patterns obtained from clean (111) oriented Si, Ge and GaAs single crystals subsequent to their irradiation with the output of a pulsed ruby laser in an ultra-high vacuum (UHV) environment suggest that metastable (1×1) surface structures are produced in the regrowth process. Conventional LEED analyses of the Si and Ge surfaces suggest that they terminate in registry with the bulk but that the two outermost interlayer spacings differ from those of the bulk. For the case of Si these changes are a contraction of 25.5 ± 2.5% and an expansion of 3.2 ± 1.5% between the first and second and second and third layers respectively.
Similar content being viewed by others
References
D. M. Zehner, C. W. White and G. W. Ownby, Appl. Phys. Lett. 36, 56 (1980).
D. M. Zehner, C. W. White and G. W. Ownby, Surf. Sci. 92, L67 (1980).
D. M. Zehner, C. W. White and G. W. Ownby in: Laser and Electron Beam Processing of Materials, C. W. White and P. S. Peercy eds. (Academic Press, New York 1980) p. 201.
P. L. Cowan and J. A. Golovchenko, J. Vac. Sci. and Technol. 17, 1197 (1980)
D. M. Zehner, C. W. White and G. W. Ownby, Appl. Phys. Lett. 37, 456 (1980).
S. M. Bedair and H. P. Smith, Jr., J. Appl. Phys. 40, 4776 (1969).
D. E. Eastman, J. Vac. Sci. and Technol. 17, 492 (1980).
H. D. Shih et al., Phys. Rev. Lett. 32, 1622 (1976); D. W. Jepsen et al, Phys. Rev. (in press).
H. L. Davis, J. R. Noonan and L. H. Jenkins, Surf. Sci. 83 559 (1979).
E. Zanazzi and F. Jona, Surf. Sci. 62 61 (1977).
D. M. Zehner, J. R. Noonan, H. L. Davis and C. W. White, submitted to J. Vac. Sci. and Technol.
D. M. Zehner, C. W. White and G. W. Ownby, unpublished results.
J. Ihm and M. L. Cohen, Phys. Rev. B 21, 1527 (1980).
T. N. C. Venkatesan et al., Appl. Phys. Lett. 35, 88 (1979).
Author information
Authors and Affiliations
Additional information
Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract W-7405-eng-26 with Union Carbide Corporation.
Rights and permissions
About this article
Cite this article
Zehner, D.M., Noonan, J.R., Davis, H.L. et al. A Leed Investigation of (111) Oriented Si, Ge and GaAs Surfaces Following Pulsed Laser Irradiation. MRS Online Proceedings Library 1, 111 (1980). https://doi.org/10.1557/PROC-1-111
Published:
DOI: https://doi.org/10.1557/PROC-1-111