Abstract
Time resolved reflectivity (TRR) measurements were carried out during pulsed laser irradiation of silicon immersed in water. It was found that the TRR in water was similar to that in air though the signal deteriorated after about 100 ns from the starting point of the laser for incident energy densities above 1.4 J/cm2 (unlike what is observed in air). The total melt duration in water was about 2.8 to 1.6 times less than that in air at the same absorbed energy density. It was estimated that 20 % of the absorbed energy was taken away by the water layer. For the same energy coupled into the solid the melt-in/regrowth kinetics was speeded up by the presence of the water layer at the surface by about a factor 2 consistant with the results of Polman et. a15.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Pulsed Laser Processing of Semiconductors, (Semiconductors and Semimetals, Vol. 23, R. F. Wood, C. W. White and R. T. Young, eds., Academic Press, New York, 1984).
Laser Annealing of Semiconductors, edited by J. M. Poate and J. W. Mayer (Academic Press, New York, 1982).
J. Y. Taso, M. J. Aziz, M. O. Thompson and P. S. Peercy, Phys. Rev. Lett., 56, 2712 (1986).
M. O. Thompson, G. J. Galvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobson, A. G. Cullis and N. G. Chew, Phys. Rev. Lett. 52, 2360 (1984).
A. Polman, S. Roorda, S. B. Ogale and F. W. Saris, in Mat. Res. Soc. Proc. 74, 129(1987).
G. Ε. Jellison, Jr., D. H. Lowndes, D.N. Mashburn and R.F. Wood, Phys. Rev. B34, 2407 (1986).
G. E. Jellison, Jr. and D. H. Lowndes, in Mat. Res. Soc. Symp. Proc. 35,113 (1985).
D. H. Lowndes, R. F. Wood and J. Narayan, Phys. Rev. Lett. 52, 561(1984).
P. P. Patil, D. M. Phase, S. A. Kulkarni, S. V. Ghaisas, S. K. Kulkarni, S. M. Kanetkar, S. B. Ogale and V. G. Bhide, Phys. Rev. Lett. 58, 238 (1987).
D. Dijkkamp, X. D. Wu, S. W. Chan and T. Venkatesan, J. Appl. Phys. 62, 293(1987)
D. M. Zehner, C.W. White and G.W. Ownby, Appl. Phys. Lett. 36,56(1980).
CRC Handbook of Chemistry and Physics, R. C. Weast and M. J. Astle, eds., (CRC Prese, Florida, 1982) p. E24.
J. J. P. Bruines, R. P. M. van Hal, H. M. J. Boots, A. Polman and F. W. Saris, Appl. Phys. Lett. 49, 1161 (1986).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Wu, X.D., Dijkkamp, D. & Venkatesan, T. Time Resolved Reflectivity Measurements on Pulsed Laser Irradiated Silicon Immersed in Water. MRS Online Proceedings Library 100, 561 (1987). https://doi.org/10.1557/PROC-100-561
Published:
DOI: https://doi.org/10.1557/PROC-100-561