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Characterization of the Depositing Flux in Laser Ablation Deposition (LAD).

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Abstract

Angular-resolved time-of-flight (ARTOF) studies have been performed on ablation plumes of copper generated by excimer laser fluences just above threshold in vacuum. Positive ions, Rydberg atoms and ground-state neutrals are observed. Relative concentrations, angular intensity distributions and angular- resolved velocity distributions are measured for ground state neutrals and ions.

Ions have the highest kinetic energies (20-80 eV). Their angular distribution is isotropic. Their concentration at the substrate is very low ( ≤ 10-6). Ground state neutrals have lower energies ( ≈ 1 eV). Their intensity and velocity is a strongly decreasing function of the polar angle. Rydberg-atoms have energies in between those of ground-state neutrals and ions. Their angular distribution is also dependent on tile polar angle.

The concentration, kinetic energy and angular distribution of the ionised species arc very well explained by a mechanism of thermal ionization and subsequent space-charge induced repulsion. The velocity distributions and angular intensity distributions of the ground-state neutrals are quantitatively predicted by a model for the flow dynamics of pulsed laser generated gas clouds.

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References

  1. J.C.S. Kools, S.H. Brongersma, E. van de Riet, and J. Dieleman,Appl. Phys.B53,125(1991).

    Article  CAS  Google Scholar 

  2. J.C.S. Kools, R.P. van Ingen, and J. Dieleman, submitted to J.Appl.Phys.

  3. R.E. Walkup, J.M. Jasinski, R.W. Dreyfus, Appl.Phys.Lett, 48, 1690 (1986).

    Article  CAS  Google Scholar 

  4. P.E. Dyer, Appl.Phys.Lett. 55, 1630 (1989).

    Article  CAS  Google Scholar 

  5. K.L. Saenger, J.Appl. Phys. 66, 4435 (1989).

    Article  CAS  Google Scholar 

  6. R. Viswanathan, I. Hussla in: “Laser Processing and Diagnostics” ed by D. Bauerle, Springer Ser. Chem. Phys. vol 39 ( Springer}Berlin/Heidelberg}1

  7. R.W. Dreyfus, J.Appl.Phys. 69, 1721 (1991)

    Article  CAS  Google Scholar 

  8. J.C.S. Kools, T.S. Baller, S.T.De Zwart, and J. Dieleman, accepted for publication in J. Appl. Phys.

  9. S.H. Brongersma, J.C.S. Kools, T.S. Baller, H.C.W. Beijerick, and J. Dieleman, Appl. Phys.Lett.59, 1311 (1991).

    Article  Google Scholar 

  10. A. Gupta, B. Braren, K.G. Casey, B.W. Hussey, and R. Kelly, Appl.Phys.Lett.59, 1302 (1991).

    Article  Google Scholar 

  11. R. Gilgenbach and P.L. Ventzek,Appl. Phys. Lett.58,1597 (1991).

    Article  CAS  Google Scholar 

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Acknowledgement

ARTOF measurements on ionized and neutral copper atoms ablated from polycrystalline copper by near-threshold excimer radiation have been performed. From these data, a quantitative description of the process can be extracted.

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Authors and Affiliations

  1. Philips Research Labs., P.O.Box 80.000, 5600 JA, Eindhoven, The Netherlands

    Jacques C. S. Kools & Jan Dieleman

Authors
  1. Jacques C. S. Kools
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  2. Jan Dieleman
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Kools, J.C.S., Dieleman, J. Characterization of the Depositing Flux in Laser Ablation Deposition (LAD).. MRS Online Proceedings Library 236, 405–410 (1991). https://doi.org/10.1557/PROC-236-405

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