Abstract
Fe-silicides were formed by annealing MBE-deposited thin 57Fe layers with thicknesses between 20 Å and 60 Å on (7 × 7) reconstructed Si(111) substrates. During the growth the substrate was held at room temperature. The suicide formation upon annealing in the temperature range of 200°C to 900°C was studied in-situ with RHEED. Samples were studied with in-situ CEMS (Conversion Electron Mössbauer Spectroscopy) as well as with ex-situ CEMS after covering with Ag to prevent oxidation. RBS/Channeling was used to study the epitaxial quality and the structure of these layers.
Using the 57Fe nuclear probe, it is shown that suicide formation occurs at the interface already at room temperature. Metastable suicides with cubic structure are observed in the low temperature annealing range, and characterized by their Mössbauer parameters. At higher temperatures stable ε-FeSi and β-FeSi2 are formed.
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References
Max Hansen, Constitution of binary alloys. (McGraw-Hill book Company 1958).
N. Onda, J. Henz, E. Müller, K.A. Mäder and H. Von Känel, Appl. Surface Sci. 56–58, 421 (1992).
J. Derrien, J. Chevrier, Le Thanh Vinh, I. Berbezier, S. Lagomarsino and M.G. Grimaldi, RMS93.
K.A. Mäder, H. Von Känel and A. Baldereschi, Phys. Rev. B 48(7), 4364 (1993).
T. Kobayashi, J. Dekoster, S. Degroote, M.H. Langelaar, L. Niesen and G. Langouche, proceedings conference in Jülich (1993).
S. Degroote, M.H. Langelaar, T. Kobayashi, J. Dekoster, J. De Wächter, R. Moons, L. Niesen and G. Langouche, to be published.
L.R. Doolittle, Nucl. Instr. Meth. B9, 344 (1985).
J. Derrien, J. Chevrier, A. Younsi, V. Le Thanh, J.P. Dussaulcy and N. Cherief, Phys. Scr. T35, 251 (1991).
X. Wallart, H.S. Zeng, J.P. Nys and G. Dalmai, Appl. Surface. Sci. 56/58, 427–433 (1992).
H. Von Känel, N. Onda, H. Sirringhaus, E. Müller, S. Goncalves-Conto and C. Schwarz, (preprint)
J. Alvarez, A.L. Vazquez de Parga, J.J. Hinarejos, J. de la Figuera, E.G. Michel, C. Ocal and R. Miranda, J. Vac. Sci. Technol. A 11(4), 929 (1993).
Örn Helgason and T.I. Sigfüsson, Hyp. Int. 45, 415–418 (1989).
J. Derrien, J. Chevrier, V. Le Thanh and J.E. Manhan, Appl. Surface Sci. 56–58, 382–393 (1992).
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Degroote, S., Langelaar, M., Kobayashi, T. et al. Fe-Silicides Formed with Molecular Beam Epitaxy and Studied with Conversion Electron Mössbauer Spectroscopy. MRS Online Proceedings Library 320, 133–138 (1993). https://doi.org/10.1557/PROC-320-133
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DOI: https://doi.org/10.1557/PROC-320-133