Abstract
In order to study atomic transport in the radiation enhanced diffusion (RED) region, Pd/Co bilayers were intermixed by 80keV Ar+ in the temperature range from 90 K to 700 K. The critical temperature for the onset of RED was found to be ∼ 400 K, and the transported amount of Pd atoms was found to be always larger than that of Co in the RED region. This result cannot be explained by pre-existing models. Thus we have developed a comprehensive model for atomic transport in the RED region including size effect, damage controlled effect, and cohesive energy effect.
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L. E. Rehn and P. R. Okamoto, Nucl. Instrum. Methods B39, 104 (1989).
Y. T. Cheng, Mater. Sci. Rept. 5, 45 (1990).
G. W. Auner, Y. T. Cheng, M. H. Alkais, and K. R. Padmanabhan, Appl. Phys. Lett. 58, 586 (1991), and Nucl. Instrum. Methods B59/60, 504 (1991).
K. Tao, C. A. Hewett, S. S. Lau, Ch. Bûchai and D. B. Poker, Appl. Phys. Lett. 50, 1343 (1987).
F. R. Ding, R. S. Averback, and H. Hann, J. Appl. Phys. 64, 1785 (1988).
K. H. Chae, J. M. Choi, S. M. Jung, J. H. Joo, J. K. Kim, H. J. Kang and C. N. Whang, Nucl. Instrum. Methods B88, 387 (1994).
K. H. Chae, J. H. Song, S. M. Jung, H. G. Jang, J. J. Woo, K. Jeong, and C. N. Whang, J. Appl. Phys. 73, 4292 (1993).
A. R. Miedema, Phil. Techn. Rev. 36, 217 (1976).
E. G. Colgan and J. W. Mayer, Nucl. Instrum. Methods B17, 242 (1986).
Y. T. Cheng, X. A. Zhao, T. W. Workmann, M.-A. Nicolet, and W. L. Johnson, J. Appl. Phys. 60, 2615 (1986).
G. S. Chen, D. Farkas, and M. Rangaswamy, Mater. Soc. Symp. Proc. 128, 195 (1989).
W. L. Johnson, Y. T. Cheng, M. Van Rossum, and M.-A. Nicolet, Nucl. Instrum. methods B7/8, 657 (1985).
R. Sizmann, J. Nucl. Mater. 69/70, 386 (1978).
J. Philibert, Atom Movements, Diffusion and Mass Transport in Solids (Edition De Physique, Les Ulis, 1991), p.98.
G. Neumann and W. Hirschwald, Phys. Status Solidi B55, 99 (1973).
A. D. Le Claire, J. Nucl. Mater. 69/70, 70 (1978).
M. S. Daw and M. I. Baskes, Phys. Rev. Lett. 50 1285 (1983).
R. A. Johnson and N. Q. Lam, Phys. Rev. B13, 4364 (1976).
H. Wiedersich, P. R. Okamoto, and N. Q. Lam, J. Nucl. Mater. 83, 98 (1979).
H. H. Andersen, Appl. Phys. 18, 131 (1979)
S. M. Myers, Nucl. Instrum. Methods 168, 265 (1980)
P. Sigmund, Appl. Phys. Lett. 14, 114 (1969)
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Jung, S.M., Chang, G.S., Joo, J.H. et al. Atomic Transport by Ion Beam Mixing in the Radiation Enhanced Diffusion Region. MRS Online Proceedings Library 354, 21–26 (1994). https://doi.org/10.1557/PROC-354-21
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DOI: https://doi.org/10.1557/PROC-354-21