Skip to main content
SpringerLink
Log in

Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo and Z.Bor; Appl.Phys.Lett. 58, 2761 (1991).

    Article  CAS  Google Scholar 

  2. J.I. Gittleman and E.K. Sichel; J.Electron.Mat. 10, 527 (1981).

    Article  Google Scholar 

  3. J. Davenas; Appl.Surf.Sci. 36, 539 (1989).

    Article  Google Scholar 

  4. E. Sutcliffe and R. Srinivasan; J.Appl.Phys. 60, 3325 (1986).

    Article  Google Scholar 

  5. M. Schumann, R. Sauerbrey and M.C. Smayling; Appl.Phys.Lett. 58, 428 (1991).

    Article  CAS  Google Scholar 

  6. H.M. Phillips, D.L. Callahan, S.P. Le Blanc, Z. Bali and R. Sauerbrey; Mat.Res.Soc.Proc. 285, 169 (1993).

    Article  CAS  Google Scholar 

  7. H.M. Phillips, T. Feurer, D.L. Callahan and R. Sauerbrey; Mat.Res. Soc.Proc. 285, 175 (1993).

    Article  CAS  Google Scholar 

  8. T. Feurer, R. Sauerbrey, M.C. Smayling and B.J. Story; Appl.Phys.A 56, 275 (1993).

    Article  Google Scholar 

  9. E. Arenholz, J. Heitz, M. Wagner, D. Baäerle, H. Hilbst and A. Hagemeyer; Appl.Surf.Sci. 69, 16 (1993).

    Article  CAS  Google Scholar 

  10. R. Srinivasan, R.R. Hall and D.C. Albee; Appl.Phys.Lett. 63, 3382 (1993).

    Article  CAS  Google Scholar 

  11. F. Kokai, H. Saito and T. Fujioka; J.Appl.Phys. 66, 3252 (1989).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Central Research & Engineering Laboratories, E.I.du Pont de Nemours & Co. Inc., Wilmington, DE, 19880-0304, USA

    James L. Hohman, Kenneth B. Keating & Michael J. Kelley

Authors
  1. James L. Hohman
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kenneth B. Keating
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Michael J. Kelley
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hohman, J.L., Keating, K.B. & Kelley, M.J. Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition. MRS Online Proceedings Library 354, 571–577 (1994). https://doi.org/10.1557/PROC-354-571

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-354-571

Search

Navigation