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Structural-Chemical Properties of InP Own Oxides

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In this article the analysis of IR reflection-absorption spectra of InP own oxides, formed by anodic, thermal and chemical oxidation was made. The influence of oxidation methods, heat treatment and presence of metal covering at the outside surface of own oxides on their structural-chemical properties were determined. On the basis of received results, the explanations of the causes of the change in electrophysical properties of InP own oxides were obtained.

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Authors and Affiliations

  1. Laboratory of Microelectronics, Technical University of Moldova, Stefan cel Mare, 168, Chisinau, 277012, Moldova

    Gennady S. Korotchenkov

  2. Department of Physics of Semiconductors, Kiev State University, Vladimirskaya 64, Kiev, 252017, Ukraine

    Valery A. Skryshevsky

Authors
  1. Gennady S. Korotchenkov
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  2. Valery A. Skryshevsky
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Korotchenkov, G.S., Skryshevsky, V.A. Structural-Chemical Properties of InP Own Oxides. MRS Online Proceedings Library 355, 497–501 (1994). https://doi.org/10.1557/PROC-355-497

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