Abstract
We performed an X-ray diffraction study of amorphous-tetrahedrally-coordinated carbon (a-tC) films prepared by pulsed laser deposition (PLD). The samples’ properties were analyzed as a function of laser energy and thickness. For all thicknesses and laser energies, films were made up of clusters with a basic unit size of 7 -11 nm. Thicker films, as well as films prepared at higher laser densities exhibit larger clusters, in the tens of nanometers. The clusters are not readily observable by AFM, which may indicate the presence of a flat (graphitized) top film surface.
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Martínez-Miranda, L.J., Friedmann, T.A., Sullivan, J.P. et al. X-Ray Diffraction Study of Clusters in a-tC Films. MRS Online Proceedings Library 358, 857 (1994). https://doi.org/10.1557/PROC-358-857
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DOI: https://doi.org/10.1557/PROC-358-857