Abstract
The diffusion barrier properties of 100-nm-thick TiN films, both as-deposited and “stuffed”, were investigated in both Al/TiN/Si and Cu/TiN/Si metallization systems. In Al/TiN/Si systems, the TiN barrier fails by the formation of both Al spikes and Si pits in the Si substrate. However, in Cu/TiN/Si systems, the failure of TiN diffusion barriers occurs by the predominant diffusion of Cu into the Si substrate, which forms dislocations along the projection of Si {111} plane and precipitates (presumably Cu-silicides) around the dislocation. In Al/TiN/Si systems, it is shown that the diffusion barrier property of TiN is significantly enhanced by “stuffing” in N2 ambient prior to Al deposition. However, in Cu/TiN/Si systems, it is found that the “stuffing” of TiN does not improve the diffusion barrier property as it does in Al/TiN/Si systems.
Similar content being viewed by others
References
H. Takasago, K. Adachi, and M. Takada, J. Electron. Mater., 18, 319 (1989).
E. R. Weber, Appl. Phys., A30, 1 (1983).
S.-Q. Wang, MRS Bulletin, vol. XIX, no. 8, Materials Research Society (1994). p. 30.
K. Ngan, R. Mosely, Z. Xu and I. J. Raaijmakers, in Proceedings of the 11th VLSI Multilevel Interconnection Conference, p. 452, IEEE, New York (1994).
N. Kumar, J. T. McGinn, K. Pourrezaei, B. Lee, and E. C. Douglas. J. Vac. Sci. Technol., A6, 1602 (1988).
I. J. Raaijmakers, R. N. Vtris, J. Yang, S. Ramaswami, A. Lagendijk, D. A. Roberts, and E. K. Broadbent, in Proc. of Mater. Res. Soc. Symp., p. 260, Pittsburgh (1992).
M. Mändl, H. Hoffmann, and P. Kücher, J. Appl. Phys., 68, 2127 (1990).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Park, KC., Kim, KB. A Comparative Study on the Titanium Nitride (TiN) as a Diffusion Barrier Between Al/Si and Cu/Si: Failure Mechanism and Effect of “Stuffing”. MRS Online Proceedings Library 391, 211 (1995). https://doi.org/10.1557/PROC-391-211
Published:
DOI: https://doi.org/10.1557/PROC-391-211