Abstract
The enhanced diffusion of boron due to high dose arsenic implantation into silicon is studied as a function of arsenic dose. The behavior of both the type-V and end-of-range loops is investigated by transmission electron microscopy (TEM). The role of arsenic deactivation induced interstitials and type-V loops on enhanced diffusion is assessed. Reduction of the boron diffusivity is observed with increasing arsenic dose at three different temperatures. The possible explanations for this reduction are discussed.
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P.M. Rousseau, P.B. Griffin and J.D. Plummer, Appl. Phys. Lett. 65, 578 (1994).
O. Dokumaci, P. Rousseau, S. Luning, V. Krishnamoorthy, K.S. Jones and M.E. Law, J. Appl. Phys. 78, 828(1995).
R.B. Fair, IEEE Trans. Electron Devices 35, 285 (1988).
S. Solmi, F. Baruffaldi and R.Canteri, J. Appl. Phys. 69, 2135 (1991).
T.O. Sedgwick, A.E. Michel, V.R. Deline, S.A. Cohen and J.B. Lasky, J. Appl. Phys. 63, 1452 (1988).
S. Solmi, F. Cembali, R. Fabbri, M. Servidori and R. Canteri, Appl. Phys. A 48, 255 (1989).
H. Cerva and G. Hobler, J. Electrochem Soc. 139, 3631 (1992).
N.E.B. Cowern, K.T.F. Janssen and H.F.F. Jos, J. Appl. Phys. 68, 6191 (1990).
S. Luning, P.M. Rousseau, P.B. Griffin, P.G. Carey and J.D. Plummer, International Electron Devices Meeting, p.457 (1992).
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Dokumaci, O., Law, M.E., Krishnamoorthy, V. et al. Effects of Arsenic Deactivation on Arsenic-Implant Induced Enhanced Diffusion in Silicon. MRS Online Proceedings Library 396, 167 (1995). https://doi.org/10.1557/PROC-396-167
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DOI: https://doi.org/10.1557/PROC-396-167