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Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

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Abstract

Fluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

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Authors and Affiliations

  1. Los Alamos National Laboratory, Los Alamos, NM, 87545, USA

    M. Hakovirta, D. H. Lee, X. M. He & M. Nastasi

Authors
  1. M. Hakovirta
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  2. D. H. Lee
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  3. X. M. He
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  4. M. Nastasi
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Hakovirta, M., Lee, D.H., He, X.M. et al. Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique. MRS Online Proceedings Library 593, 285–290 (1999). https://doi.org/10.1557/PROC-593-285

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  • DOI: https://doi.org/10.1557/PROC-593-285

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