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A Theory for Multi Damage Evaluation of TiN Thin Film

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Abstract

The present paper experimentally studies the cracking phenomena of a TiN thin film on a titanium alloy, and presents a new approach to predict the number of cracks under tensile load. An elastoplastic shear-lag model is developed to obtain the stress distribution caused by the film cracks, which is found to agree well with that calculated with FEM. The number of thin film cracks is predicted using a Monte Carlo simulation using the present approach, and favourably compared with the experimental results.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama, 230, Japan

    Kazunori Misawa & Masao Shimizu

  2. Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, c/o Komaba Open Laboratory (KOL), Takeda Lab., 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8904, Japan

    Tomonaga Okabe & Nobuo Takeda

  3. Toppan Technical Research Institute, Sugito-machi, Kitakatsushika-gun, Saitama, 345, Japan

    Masaaki Yanaka

Authors
  1. Kazunori Misawa
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  2. Tomonaga Okabe
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  3. Masaaki Yanaka
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  4. Masao Shimizu
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  5. Nobuo Takeda
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Misawa, K., Okabe, T., Yanaka, M. et al. A Theory for Multi Damage Evaluation of TiN Thin Film. MRS Online Proceedings Library 653, 710 (2000). https://doi.org/10.1557/PROC-653-Z7.10

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  • DOI: https://doi.org/10.1557/PROC-653-Z7.10

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