Skip to main content
SpringerLink
Log in

High Tg, Low Dielectric Constant Aromatic Benzoxazoles Containing Allylether Pendent Groups for Use in Microelectronic Packaging

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Next generation microelectronic packaging requirements are driving the need to produce increasingly lower dielectric constant materials while maintaining high thermal stability and ease of processing. Polymer candidates with exceptionally low dielectric constant (2.0-2.4), high thermal stability (degradation temperature higher than 400°C), high glass transition temperature (greater than 350°C), low water uptake (less than one percent), solubility in selected organic solvents, and low thermal expansion are all required. We have successfully synthesized and characterized several candidate polymers in an effort to address these needs.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T.D. Dang, P.T. Mather, M.D. Alexander Jr., C.J. Grayson, M.D. Houtz, R.J. Spry, F.E. Arnold, J Poly. Sci. Part A: Poly Chem, 38 1991 (2000)

    Article  CAS  Google Scholar 

  2. Thuy Dang, Leslie S. Hudson, William A. Feld, and Fred E. Arnold, Polymer Preprints 41(1), 103 (2000)

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Polymer Branch, Materials and Manufacturing Directorate, Air Force Research Laboratory Wright-Patterson Air Force Base, Ohio, 45433-7750, USA

    Max D. Alexander Jr., Thuy D. Dang, Christina E. Specker, Marlene Houtz, R. J. Spry & Fred E. Arnold

Authors
  1. Max D. Alexander Jr.
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Thuy D. Dang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Christina E. Specker
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Marlene Houtz
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. R. J. Spry
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Fred E. Arnold
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Alexander, M.D., Dang, T.D., Specker, C.E. et al. High Tg, Low Dielectric Constant Aromatic Benzoxazoles Containing Allylether Pendent Groups for Use in Microelectronic Packaging. MRS Online Proceedings Library 682, 66 (2001). https://doi.org/10.1557/PROC-682-N6.6

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-682-N6.6

Search

Navigation