Skip to main content
SpringerLink
Log in

Anomalies in the Behavior of Mo Field Emitter Arrays in Inert Gases and Some Insights into the Degradation Mechanisms

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Field emission displays can be seriously limited by the rapid current degradation of Mo field emitter arrays primarily due to poor vacuum conditions inside their thin vacuum packages. There have been a number of studies to understand the interaction mechanisms. However, we find that models that have been proposed so far are not consistent with observed device behavior in a variety of gas ambients including inert gases and hydrogen. In this paper, we present a summary of our results on residual gases inside a large number of field emission displays, and the effects of these gases on emission behavior. We describe how these issues and the inter-electrode spacing leading to local pressure buildup impact device life. We present an alternate model based on shallow ion implant to explain the observed device behavior.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Temple, Mat. Sci. Engineering Rep. R24, 185 (1999).

    Article  CAS  Google Scholar 

  2. I. Brodie and C.A. Spindt, Adv. Electron. Electron Phys. 47, 1 (1992).

    Google Scholar 

  3. G. Hopple and C. Curtin, Inform. Display 16, 34 (2000).

    Google Scholar 

  4. S. Itoh, T. Niiyama, and M. Yokoyama, J. Vac. Sci. Technol. B11, 647 (1993).

    Article  Google Scholar 

  5. B.R. Chalamala, R.M. Wallace, and B.E. Gnade, J. Vacb. Sci. Technol. B16, 2859 (1998).

    Article  Google Scholar 

  6. B.R. Chalamala and R.H. Reuss, J. Vac. Sci. Technol. B18, 1825 (2000).

    Article  Google Scholar 

  7. P.R. Schwoebel and C.A. Spindt, Appl. Phys. Lett. 63, 33 (1993).

    Article  CAS  Google Scholar 

  8. B.R. Chalamala, R.M. Wallace and B.E. Gnade, J. Vac. Sci. Technol. B16, 2855 (1998).

    Article  Google Scholar 

  9. S.H. Jo, B.G. Park and J.D. Lee, Appl. Phys. Lett. 68, 2234 (1996).

    Article  CAS  Google Scholar 

  10. B.R. Chalamala and R.H. Reuss, Appl. Phys. Lett. 78, 2151 (2001)

    Article  CAS  Google Scholar 

  11. J.F. Ziegler, SRIM-2000, The Stopping and Range of Ions in Matter (SRIM-2000).

    Google Scholar 

  12. C.-C. Peng and C.-H. Tsai, US Patent: 5578900 (1996).

    Google Scholar 

  13. B.R. Chalamala and R.H. Reuss, Appl. Phys. Lett. 78, to appear (2001).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Semiconductor Products Sector, Digital DNA Laboratory, Motorola, Inc., 2100 E. Elliot Road, Tempe, AZ, 85284, USA

    Robert H. Reuss & Babu R. Chalamala

Authors
  1. Robert H. Reuss
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Babu R. Chalamala
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Reuss, R.H., Chalamala, B.R. Anomalies in the Behavior of Mo Field Emitter Arrays in Inert Gases and Some Insights into the Degradation Mechanisms. MRS Online Proceedings Library 685, 1521 (2001). https://doi.org/10.1557/PROC-685-D15.2.1

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-685-D15.2.1

Search

Navigation