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Thermal Activation of Beryllium in GaN Grown by RF-Plasma Molecular Beam Epitaxy

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Abstract

Differences in the optical activity of Be in GaN epilayers grown on different surface polarities by rf-plasma molecular beam epitaxy are investigated. Nitrogen-polar GaN doped with Be exhibits a significantly higher intensity of donor-acceptor pair (DAP) photo-luminescence (PL) than similarly doped Ga-polar GaN, indicating the Be is incorporating at microscopically different sites, or possibly is forming different compensating complexes. Highly Be-doped Ga-polar GaN apparently forms isolated polarity-inverted regions which then incorporate Be via the N-polar mechanism resulting in the DAP PL. High temperature annealing of the Ga-polar layers both under nitrogen/hydrogen mixtures and under pure nitrogen atmospheres activates the DAP PL.

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References

  1. M.A. Sanchez-Garcia, E. Calleja, F.J. Sanchez, F. Calle, E. Monroy, D. Basak, E. Munoz, C. Villar, A. Sanz-Hervas, M. Aguilar, J.J. Serizan and J. M. Blanco, J. Elec. Mat. 27, 276 (1998)

    Article  CAS  Google Scholar 

  2. D. J. Dewsnip, A. V. Andrianov, I. Harrison, J. W. Orton, D. E. Lacklison, G. B. Ren, S.E. Hooper, T. S. Cheng and C. T. Foxon, Semicond. Sci. Technol. 13, 500 (1998)

    Article  CAS  Google Scholar 

  3. K.H. Ploog and O. Brandt, J. Vac. Sci. Technol. A 16, 1609 (1998)

    Article  CAS  Google Scholar 

  4. Yuejun Sun, Leng Seow Tan, Soo Jin Chua and Savarimuthu Prakash, Mat. Res. Soc. Symp. 595, W3.82.1 (2000)

    CAS  Google Scholar 

  5. Yoshitaka Nakano and Takashi Jimbo, Appl. Phys. Lett. 81, 3990 (2002)

    Article  CAS  Google Scholar 

  6. T.H. Myers, L.S. Hirsch, L.T. Romano, and M.R. Richards-Babb, J. Vac. Sci. Technol. B16, 2261 (1998)

    Article  Google Scholar 

  7. A.R. Smith, V. Ramachandran, R.M. Feenstra, D.W. Greve, A. Ptak, T. H. Myers, W. Sarney, L. Salamanca-Riba, M. Shin and M. Skowronski, MRS Internet J. Nitride Semicond. Res. 3, 12 (1998)

    Article  Google Scholar 

  8. E.J. Tarsa, B. Heying, X.H. Wu, P. Fini, S.P. DenBaars, and J.S. Speck, J. Appl. Phys. 82, 5472 (1997)

    Article  CAS  Google Scholar 

  9. A.J. Ptak, Lijun Wang, N.C. Giles, T.H. Myers, L.T. Romano, C. Tian, R.A. Hockett, S. Mitha and P. Van Lierde, Appl. Phys. Lett. 79, 4524 (2001)

    Article  CAS  Google Scholar 

  10. D.A. Stocker, E.F. Schubert and J.M. Redwing, Appl. Phys. Lett. 73, 2654 (1998)

    Article  CAS  Google Scholar 

  11. F.J. Sanchez, F. Calle, M.A. Sanchez-Garcia, E. Calleja, E. Munoz, C.H. Molloy, D.J. Somerford, J.J. Serrano and J.M. Blanco, Semicond. Sci. Technol. 13, 1130 (1998)

    Article  CAS  Google Scholar 

  12. A.J. Ptak, T.H. Myers, Lijun Wang, N.C. Giles, M. Moldovan, C.R. Da Cunha, L.A. Hornak, C. Tian, R.A. Hockett, S. Mitha and P. Van Lierde, Mat. Res. Soc. Symp. 639, G3.3 (2001)

    Article  Google Scholar 

  13. T.H. Myers, A.J. Ptak, Wang Lijun, and N.C. Giles, Inst. of Pure and Appl. Phys. Conference Series 1, 451 (2000)

    CAS  Google Scholar 

  14. F.A. Reboredo and S.T. Pantelides, Phys. Rev. Lett. 82, 1887 (1999)

    Article  CAS  Google Scholar 

  15. F. Calle, F.J. Sanchez, J.M.G. Tijero, M.A. Sanchez-Garcia, E. Calleja and R. Beresford, Semicond. Sci. Technol. 12, 1396 (1997)

    Article  CAS  Google Scholar 

  16. E. Calleja, M.A. Sanchez-Garcia, F. Calle, F.B. Naranjo, E. Munoz, U. Jahn, K. Ploog, J. Sanchez, J. M. Calleja, K. Saarinen and P. Hautojarvi, Mat. Sci. and Eng. B 82, 2 (2001)

    Article  Google Scholar 

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Acknowledgments

We thank C. Y. Peng for assistance with the annealing studies. This work was supported by ONR Grants N00014-02-1-0974 and N00014-01-1-0571, both monitored by Colin E. C. Wood.

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Van Mil, B.L., Lee, K., Wang, L. et al. Thermal Activation of Beryllium in GaN Grown by RF-Plasma Molecular Beam Epitaxy. MRS Online Proceedings Library 798, 187–192 (2003). https://doi.org/10.1557/PROC-798-Y10.59

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  • DOI: https://doi.org/10.1557/PROC-798-Y10.59

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