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Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing

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Abstract

We investigated the process of the hole inlet closure in surface-diffusion-driven transformation of arrays of high-aspect-ratio holes on Si(001) substrates. The inlet gradually shrinks while keeping the circular shape because of lateral bulging of the inlet surface. We observed complicated top view morphologies reflecting the four-fold symmetry of the Si(001) surface on the inlet surface. Large {111} and {113} facets are formed in the four equivalent azimuths of the [110], while corrugated patterns arise in the four equivalent azimuths of the [100]. Atomic force microscopy observations reveal that the corrugated pattern is composed of three types of small facets, namely, {110} and two {113} in relation of the mirror symmetry. The corrugated pattern formation is due to the geometrical restriction that there is no stable facet between (001) and (010) in the [010] azimuth. The observed morphological evolution is interpreted as surface-diffusion-driven transformation under constraint of the anisotropic surface energy of Si.

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Authors and Affiliations

  1. Fuji Electric Holdings Co., Ltd., 4-18-1, Tsukama, 390-0821, Matsumoto, Nagano, Japan

    Reiko Hiruta

  2. Fuji Electric Systems Co., Ltd., 4-18-1, Tsukama, 390-0821, Matsumoto, Nagano, Japan

    Hitoshi Kuribayashi

  3. The Institute of Scientific and Industrial Research, Osaka University, 8-1, Mihogaoka, 567-0047, Ibaraki, Osaka, Japan

    Koichi Sudoh

  4. Japan Science and Technology Agency, 5, Sanbancho, 102-0075, Chiyoda-ku, Tokyo, Japan

    Ryosuke Shimizu

Authors
  1. Reiko Hiruta
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  2. Hitoshi Kuribayashi
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  3. Koichi Sudoh
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  4. Ryosuke Shimizu
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Hiruta, R., Kuribayashi, H., Sudoh, K. et al. Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing. MRS Online Proceedings Library 1299, 404 (2011). https://doi.org/10.1557/opl.2011.55

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