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Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport

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Abstract

We report on the realization of high precision hollow structures directly on silicon suitable for liquid and gas/vapor transport. The formation of hollow structures requires high aspect ratio etching combined with bulk back-side micro-machining to realize silicon-based membranes. The use of a slant angle deposition method has been used as an alternative method for three-dimensional lithography. The transfer of acetone vapor through such tiny holes shows an anomalous behavior where a sharp rise is observed followed by an exponential and gradual decay. These structures can be eventually used as mass ion separation devices.

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Authors and Affiliations

  1. Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran

    Z. Sanaee, S. Mohajerzadeh, M. Mehran & M. Araghchini

Authors
  1. Z. Sanaee
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  2. S. Mohajerzadeh
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  3. M. Mehran
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  4. M. Araghchini
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Sanaee, Z., Mohajerzadeh, S., Mehran, M. et al. Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport. MRS Online Proceedings Library 1299, 505 (2011). https://doi.org/10.1557/opl.2011.60

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  • DOI: https://doi.org/10.1557/opl.2011.60

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