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Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique

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Abstract

This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.

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References

  1. J. A. Bean, A. Weeks and G. D. Boreman, “Performance optimization of antenna-coupled Al/AlOx/Pt tunnel diode infrared detectors”, IEEE J. Quantum Electron. 47, 126–135, (2011)

    Article  CAS  Google Scholar 

  2. M. Dagenais, K. Choi, F. Yesilkoy, A. N. Chryssis and M. C. Peckerar, “Solar spectrum rectification using nano-antennas and tunneling diodes”, Optoelectronic Integrated Circuits, San Francisco, USA, January 27–28, 2010, Proc. SPIE 7605, 76050E, (2010)

    Google Scholar 

  3. J. Alda, J. M. Rico-García, J. M. López-Alonso and G. Boreman, “Optical antennas for nano-photonic applications”, Nanotechnology, 16, S230–S234, (2005)

    Article  CAS  Google Scholar 

  4. F. Stabler, “Automotive thermoelectric generators: design & manufacturing”, Proc. MRS Spring Meeting, San Francisco, USA, April 13–17, 2009, Symposium N: Materials and Devices for Thermal-to-Electric Energy Conversion

    Google Scholar 

  5. K. M. Evenson, D. A. Jennings and F. R. Peterson, “Tunable far-infrared spectroscopy”, Appl. Phys. Lett., 44, 576–578, (1984)

    Article  CAS  Google Scholar 

  6. S. P. Kwok, G. I. Haddad and G. Lobov, “Metal-Oxide-Metal (M-O-M) Detector”, J Appl. Phys., 42, 554–563, (1971)

    Article  CAS  Google Scholar 

  7. L. E. Dodd, D. Wood and A. J. Gallant, “Optimizing MOM Diode Performance via the Oxidation Technique”, Proc. IEEE Sensors 2011, Limerick, Ireland, 28-31 October, 2011, 176–179

    Chapter  Google Scholar 

  8. B. Tiwari, J. A. Bean, G. Szakmany, G. H. Bernstein, P. Fay and W. Porod, “Controlled etching and regrowth of tunnel oxide for antenna-coupled metal-oxide-metal diodes”, J Vac. Sci. Technol., 27, 2153–2160, (2009)

    Article  CAS  Google Scholar 

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Acknowledgments

The authors wish to thank Dr Mark Rosamond and Mr Leon Bowen for their assistance preparing samples using the FIB, Dr Budhika Mendis for the TEM images and finally Dr Richard Thompson for the RBS analysis.

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Authors and Affiliations

  1. School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom

    Linzi E. Dodd, Andrew J. Gallant & David Wood

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  1. Linzi E. Dodd
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  2. Andrew J. Gallant
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  3. David Wood
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Dodd, L.E., Gallant, A.J. & Wood, D. Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique. MRS Online Proceedings Library 1415, 91–96 (2012). https://doi.org/10.1557/opl.2012.72

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