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Nanostructured ZnO Films with Enhanced Sensitivity to CO Synthesized by AACVD

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Abstract

The effect of the destruction temperature during aerosol-assisted chemical vapor deposition of highly dispersed ZnO on its microstructural characteristics has been studied with the aim of developing an efficient method for fabrication of selective gas-sensing films based on semiconductor metal oxides. It has been demonstrated that increasing the operating temperature from 350 to 450°С leads to a change in the shape of nanoparticles from a regular hexagonal prism to a sphere. For the films obtained in a stream of nitrogen and air as carrier gases at a destruction temperature of 400°С, the chemoresistive gas-sensing properties have been studied. The highest sensitivity has been observed at a detection temperature of 250°С toward carbon monoxide (response Rair/RCO is 1.3–6.1 when detecting 4–100 ppm CO). The films are characterized by good selectivity: at 250°С, the responses to NH3, NO2, benzene, and H2 were no higher than 1.7, while the responses to CO were 3.7 and 6.1 for coatings fabricated in a flow of air and nitrogen, respectively.

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Funding

The study was supported by the Russian Science Foundation (project no. 20-73-00309).

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Authors and Affiliations

  1. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, 119991, Moscow, Russia

    A. S. Mokrushin, Yu. M. Gorban’, N. P. Simonenko, E. P. Simonenko, V. G. Sevast’yanov & N. T. Kuznetsov

  2. Mendeleev University of Chemical Technology of Russia, 125047, Moscow, Russia

    Yu. M. Gorban’

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  1. A. S. Mokrushin
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  2. Yu. M. Gorban’
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  3. N. P. Simonenko
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Correspondence to A. S. Mokrushin.

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Translated by G. Kirakosyan

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Mokrushin, A.S., Gorban’, Y.M., Simonenko, N.P. et al. Nanostructured ZnO Films with Enhanced Sensitivity to CO Synthesized by AACVD. Russ. J. Inorg. Chem. 66, 1447–1454 (2021). https://doi.org/10.1134/S0036023621090072

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  • DOI: https://doi.org/10.1134/S0036023621090072

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