Abstract
To test the grazing incidence diffraction scheme for applications to surface studies we have measured with high resolution the angular dependence (“rod profile”) of the [220] Bragg intensity of X-rays under the condition of total reflection from the [001] surface of a Si single crystal. The experimental data agree quantitatively with predictions of the dynamical scattering theory, which takes into account a natural oxide layer and a tilt of the [220] lattice planes.
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Bernhard, N., Burkel, E., Gompper, G. et al. Grazing incidence diffraction of X-rays at a Si single crystal surface: Comparison of theory and experiment. Z. Physik B - Condensed Matter 69, 303–311 (1987). https://doi.org/10.1007/BF01307289
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DOI: https://doi.org/10.1007/BF01307289