Summary
Epitaxial (001)-oriented ultrathin YBCO films of different thicknesses are deposited by Inverted Cylindrical Magnetron Sputtering (ICMS) on (100) MgO single-crystal substrates. The mean films stoichiometry is determined by Rutherford Backscattering (RBS). Auger Electron Spectroscopy (AES), X-ray Photoemission Spectroscopy (XPS) and Scanning Electron Microscopy (SEM) are employed in order to analyse film growth, and identify spurious phases present in the samples.
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Granozio, F.M., Perillo, E., di Uccio, U.S. et al. Structural and morphological properties of ultrathin YBCO films grown on single-crystal substrates. Nouv Cim D 16, 2031–2038 (1994). https://doi.org/10.1007/BF02471863
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DOI: https://doi.org/10.1007/BF02471863