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Charge-discharge induced phase transformation of RuO2 electrode for thin film supercapacitor

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Abstract

We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.

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Authors and Affiliations

  1. Nano-Materials Research Center & Micro Cell Laboratory, Korea Institute of Science and Technology, Cheongryang, Dongdaemun-gu, P.O. Box 131, 130-650, Seoul, Korea

    Han-Ki Kim & Young Soo Yoon

  2. Department of Electrical and Computer Engineering Micro and Nanotechnology Laboratory, University of Illinois, 61801, Urbana, Illinois, USA

    Han-Ki Kim

  3. Department of Materials Science and Engineering Semiconductor Thin Film Laboratory, Kwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, 500-712, Gwangju, Korea

    Han-Ki Kim & Tae-Yeon Seong

  4. Department of Advanced Materials Science and Engineering, Kangwon National University, 192-1 Hyoja 2-dong, 200-701, Chuncheon, Korea

    S. M. Lee

Authors
  1. Han-Ki Kim
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  2. Tae-Yeon Seong
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  3. S. M. Lee
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  4. Young Soo Yoon
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Correspondence to Young Soo Yoon.

Additional information

This article is based on a presentation made in the 2002 Korea-US symposium on the “Phase Transformations of Nano-Materials”, organized as a special program of the 2002 Annual Meeting of the Korean Institute of Metals and Materials, held at Yonsei University, Seoul, Korea on October 25–26, 2002.

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Kim, HK., Seong, TY., Lee, S.M. et al. Charge-discharge induced phase transformation of RuO2 electrode for thin film supercapacitor. Met. Mater. Int. 9, 239–246 (2003). https://doi.org/10.1007/BF03027042

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