Skip to main content
SpringerLink
Log in

Structural, electrical and optical properties of boron doped ZnO thin films using LSMCD method at room temperature

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Zn1−x B x O (0≤x≤0.04) thin films were deposited by the liquid source misted chemical vapor deposition (LSMCD) method. The thin films were polycrystalline with grain sizes of 16 nm to 22 nm. The structural, optical, and electrical properties were investigated by X-ray diffraction, UV-visible spectrophotometry, Raman spectroscopy, and Hall effect measurement. Also scanning electron (SEM) and atomic force microscopy (AFM) techniques were used in order to determine the morphological and topological characteristics of the films. The optimal result of Zn1−x B x O films was obtained at x=0.02, with a low resistivity of ≈10−2 Ω cm, and a high transmittancy of 85% in the visible light spectrum (300 nm ∼ 800 nm).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T. Gao, Q. Li, T. Wang, Chem. Mater. 17, 887 (2005)

    Article  Google Scholar 

  2. X.D. Wang, C.J. Summers, Z.L. Wang, Nano Lett. 4, 423 (2004)

    Article  ADS  Google Scholar 

  3. Q. Li, V. Kummar, Y. Li, H. Zhang, T.J. Marks, R.P.H. Chang, Chem. Mater. 17, 1001 (2005)

    Article  Google Scholar 

  4. B.B. Lakshmi, C.J. Patrissi, C.R. Martin, Chem. Mater. 9, 2544 (1997)

    Article  Google Scholar 

  5. Y. Jin, J. Wang, B. Sun, J.C. Blakesley, N.C. Greenham, Nano Lett. 8, 1649 (2008)

    Article  ADS  Google Scholar 

  6. C. Soci, A. Zhang, B. Xiang, S.A. Dayeh, D.P.R. Aplin, J. Park, X.Y. Bao, Y. H Lo, D. Wang, Nano Lett. 7, 1003 (2007)

    Article  ADS  Google Scholar 

  7. H. Kind, H.Q. Yan, M. Law, P.D. Yang, Adv. Mater. 14, 158 (2002)

    Article  Google Scholar 

  8. R. Wang, A.W. Sleight, D. Cleary, Chem. Mater. 8, 433 (1996)

    Article  Google Scholar 

  9. A. Ambrosini, S. Malo, K. Poeppelmeier, Chem. Mater. 14, 58 (2002)

    Article  Google Scholar 

  10. G.B. Palmer, K.R. Poeppelmeier, T.O. Mason, Chem. Mater. 9, 3121 (1997)

    Article  Google Scholar 

  11. K.W. Kim, M.K. Jeon, S.K. Oh, T.S. Kim, Y.S. Kim, S.I. Woo, Proc. Natl. Acad. Sci. (USA) 104, 1134 (2007)

    Article  ADS  Google Scholar 

  12. T.S. Kim, K.W. Kim, M.K. Jeon, C.H. Jung, S.I. Woo, Appl. Phys. Lett. 90, 042912 (2007)

    Article  ADS  Google Scholar 

  13. X.B. Wang, C. Song, K.W. Geng, F. Zeng, F. Pan, J. Phys. D: Appl. Phys. 39, 4992 (2006)

    Article  ADS  Google Scholar 

  14. J. Hu, R.G. Gordon, J. Appl. Phys. 72, 5381 (1992)

    Article  ADS  Google Scholar 

  15. M. Chen, B.D. Cullity, Elements of X-ray Diffractions (Addison-Wesley, Reading, 1978), p. 102

    Google Scholar 

  16. http://en.wikipedia.org/wiki/Ionic_radius (2009)

  17. T.C. Damen, S.P.S. Porto, B. Tell, Phys. Rev. 142, 570 (1966)

    Article  ADS  Google Scholar 

  18. Y. Zhang, H.B. Jia, R.H. Wang, C.P. Chen, X.H. Luo, D.P. Yu, Appl. Phys. Lett. 83, 4631 (2003)

    Article  ADS  Google Scholar 

  19. C. Bundesmann, N. Ashkenov, M. Schubert, D. Spemann, T. Butz, E. Kaidashev, M. Lorenz, M. Grundmann, Appl. Phys. Lett. 83, 1974 (2003)

    Article  ADS  Google Scholar 

  20. E.M. Bachari, G. Baud, S.B. Amor, M. Jacquet, Thin Solid Films 348, 165 (1999)

    Article  ADS  Google Scholar 

  21. J.H. Lee, B.W. Yeo, B.O. Park, Thin Solid Films 457, 333 (2004)

    Article  ADS  Google Scholar 

  22. M.K. Izaki, J. Electrochem. Soc. 147, 210 (2000)

    Article  Google Scholar 

  23. E. Bursten, Phys. Rev. 93, 632 (1954)

    Article  ADS  Google Scholar 

  24. G.L. Mar, P.Y. Timbrell, R.N. Lamb, Chem. Mater. 7, 1890 (1995)

    Article  Google Scholar 

  25. H. Ishizaki, M. Imaizumi, S. Matsuda, M. Izaki, T. Ito, Thin Solid Films 411, 65 (2002)

    Article  ADS  Google Scholar 

  26. K.L. Chopra, S. Major, D.K. Pandya, Thin Solid Films 102, 1 (1983)

    Article  ADS  Google Scholar 

  27. J.W. Orton, M.J. Powell, Rep. Prog. Phys. 43, 1263 (1980)

    Article  ADS  Google Scholar 

  28. K. Ellmer, J. Phys. D: Appl. Phys. 34, 3097 (2001)

    Article  ADS  Google Scholar 

  29. X.L. Chen, B.H. Xu, J.M. Xue, Y. Zhang, C.C. Wei, J. Sun, Y. Wang, X.D. Zhang, X.H. Geng, Thin Solid Films 515, 3753 (2007)

    Article  ADS  Google Scholar 

  30. J. Steinhauser, S. Faÿ, N. Oliveira, E. Vallat-Sauvain, C. Ballif, Appl. Phys. Lett. 90, 142107 (2007)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemical and Biomolecular Engineering, Nano Catalysis and Materials Lab, Korea Advanced Institute of Science and Technology, Daejeon, 305-701, Republic of Korea

    Gilho Kim, S. K. Rout & Seong Ihl Woo

  2. LG Chem, Ltd., 104-1, Moonji-dong, Yuseong-gu, Daejong, 305-308, Republic of Korea

    Jungsik Bang

  3. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, 305-701, Republic of Korea

    Yunseok Kim

Authors
  1. Gilho Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jungsik Bang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yunseok Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. K. Rout
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Seong Ihl Woo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Seong Ihl Woo.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, G., Bang, J., Kim, Y. et al. Structural, electrical and optical properties of boron doped ZnO thin films using LSMCD method at room temperature. Appl. Phys. A 97, 821–828 (2009). https://doi.org/10.1007/s00339-009-5317-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-009-5317-9

PACS

Search

Navigation