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Diamond-like carbon layer formation on graphite by excimer laser irradiation

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fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8 g/cm3, as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp3 hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650 °C for 30 min recovers the graphite structure.

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Authors and Affiliations

  1. JATE University Dept. of Optics and Quantum Electronics, H-6720 Szeged, Dóm tér 9, Hungary, , , , , , HU

    Á. Mechler, Z. Kántor & Z. Bor

  2. Research Group on Laser Physics of the Hungarian Academy of Sciences, H-6720 Szeged, Dóm tér 9, Hungary (Fax: +36-62/322-529, E-mail: heszler@physx.u-szeged.hu), , , , , , HU

    P. Heszler & T. Szörényi

Authors
  1. Á. Mechler
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  2. P. Heszler
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  3. Z. Kántor
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  4. T. Szörényi
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  5. Z. Bor
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Received: 26 March 1998/Accepted: 27 March 1998

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Mechler, Á., Heszler, P., Kántor, Z. et al. Diamond-like carbon layer formation on graphite by excimer laser irradiation . Appl Phys A 66, 659–661 (1998). https://doi.org/10.1007/s003390050729

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  • DOI: https://doi.org/10.1007/s003390050729

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