Abstract
An innovative magnetically levitated system design is presented in this paper. The proof mass, used as the seismic detection components for gyroscopes, is levitated by the presented micro-coil actuator so that the concerns that mechanical fatigue, asymmetry and mis-alignments, which are inevitably present in the traditional mechanical springs design, can be ruled out. In addition, the limited range of dual-axis motion of the proof mass is completely relaxed and therefore the resolution and sensitivity of the gyroscope can be greatly upgraded. That is, the proof mass can be much at higher frequencies and the stroke of the sense-mode motion can be more enlarged, in comparison with the conventional design (i.e., mechanical springs). In addition, self-sensing technique is employed to replace the gap sensors which provide the feedback signal for position regulation of the proof mass, for the sake of cost-down for mass production. A sliding mode control strategy is included to account for the effects of nonlinearity of the maglev system dynamics and hysteresis uncertainty of the micro-coil actuator. The proposed controller is verified by computer simulations and experiments to illustrate its superior capability to stabilize the inherently unstable maglev system and ensure fast response for the lateral position regulation of the seismic proof mass.
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Ayazi F, Najafi K (2001) A HARPSS polysilicon vibrating ring gyroscope. J Microelectromech Syst 10(2):169–179. doi:10.1109/84.925732
Baloh M, Tao G, Allaire P (1999) Adaptive estimation of magnetic bearing parameters. In: IEEE conference on control applications, Hawai’i, USA, pp 1193–1198
Bochobza DO, Seter DJ, Socher E, Nemirovsky Y (2000) Novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation. Sens Actuators A Phys 83(1):54–60. doi:10.1016/S0924-4247(00)00297-1
Clark WA, Howe RT, Horowitz R (1996) Surface micromachined Z-axis vibratory rate gyroscope. In: Technical digest. solid-state sensor and actuator workshop, Hilton Head Island, SC, USA, pp 283–287
David CM, Maslen EH, Noh MD (1996) Augmented circuit model for magnetic bearings including eddy currents, fringing, and leakage. IEEE Trans Magn 32(4):3219–3227. doi:10.1109/20.508385
Duan GR, Howe D (2003) Robust magnetic bearing control via eigenstructure assignment dynamical compensation. IEEE Trans Control Syst Technol 11(2):204–215. doi:10.1109/TCST.2003.809253
Eisenover C, Martinez DR (2005) Non linear dynamics of an electromagnetic suspension/levitation system. In: International conference on industrial electronics and control applications, Swissotel, Quito, Ecuador
Ford C et al (2000) Cavity element for resonant micro optical gyroscope. IEEE Aerosp Electron Syst Mag 15(2):33–36. doi:10.1109/62.891978
Hao Z, Ayazi F (2005) Thermoelastic damping in flexural-mode ring gyroscopes. In: Proceedings of the IEEE international conference on micro electro mechanical systems, Miami, FL, pp 335–343
He G, Najafi K (2002) A single-crystal silicon vibrating ring gyroscope. In: Proceedings of the IEEE micro electro mechanical systems, Las Vegas, Nevada, pp 718–721
Jeng JT (2000) Nonlinear adaptive inverse control for the magnetic bearing system. J Magn Magn Mater 209(1–3):186–188. doi:10.1016/S0304-8853(99)00683-6
Kao CK, Sinha A (1992) Coupled model sliding control of vibration in flexible structure. J Guid 15(1):65–72. doi:10.2514/3.20802
Kikuchi T et al (2005) Miniaturized quartz vibratory gyrosensor with hammer-headed arms. In: Proceedings of the 2004 IEEE international frequency control symposium and exposition, Montréal, Québec, pp 330–333
Lee JH et al (2003) Experimental study of sliding mode control for a benchmark magnetic bearing system and artificial heart pump suspension. IEEE Trans Control Syst Technol 11(1):128–138. doi:10.1109/TCST.2002.806457
Lin CE, Jou HL (1993) Force model identification for magnetic suspension systems via magnetic field measurement. IEEE Trans Instrum Meas 42(3):767–771. doi:10.1109/19.231612
Mazenc F, Queiroz MSD, Malisoff M, Gao F (2006) Further results on active magnetic bearing control with input saturation. IEEE Trans Control Syst Technol 14(5):914–919. doi:10.1109/TCST.2006.876910
Park KY, Lee CW, Oh YS, Cho YH (1998) Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs. Sens Actuators A Phys 64(1):69–76. doi:10.1016/S0924-4247(97)01656-7
Saukoski M, Aaltonen L, Halonen KAI (2007) Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sens J 7(2):1639–1651. doi:10.1109/JSEN.2007.908921
Seshia AA, Howe RT, Montague S (2002) An integrated microelectromechanical resonant output gyroscope. In: Proceedings of the IEEE micro electro mechanical systems, Las Vegas, Nevada, pp 722–726
Shearwood C, Hoa KY, Williams CB, Gonga H (2000) Development of a levitated micromotor for application as a gyroscope. Sens Actuators A Phys 83:85–92. doi:10.1016/S0924-4247(00)00292-2
Shearwood C et al (1995) Levitation of a micromachined rotor for application in a rotating gyroscope. Electron Lett 31(27):1845–1846. doi:10.1049/el:19951232
Srikantha PA et al (2006) Modal coupling in micromechanical vibratory rate gyroscopes. IEEE Sens J 6(5):1144–1152. doi:10.1109/JSEN.2006.881432
Sivrioglu S (2007) Adaptive control of nonlinear zero-bias current magnetic bearing system. Nonlinear Dyn 48(1–2):175–184. doi:10.1007/s11071-006-9081-5
Tsai N-C, Wu B-Y (2008) Nonlinear dynamics and control for single-axis gyroscope systems. Nonlinear Dyn 51:355–364. doi:10.1007/s11071-007-9216-3
Wagner B, Benecke W (1990) Magnetically driven microactuators: design considerations, Microsystems Technologies 90, Springer Verlag
Wu X, Chen W, Zhao X, Zhang W (2006a) Development of a micromachined rotating gyroscope with electromagnetically levitated rotor. J Micromech Microeng 16:1993–1999. doi:10.1088/0960-1317/16/10/011
Wu XS, Chen WY, Zhao XL, Zhang WP (2006b) Micromachined rotating gyroscope with electromagnetically levitated rotor. Electron Lett 42(16):912–913. doi:10.1049/el:20061479
Yoshimoto T (1983) Eddy current effect in a magnetic bearing model. IEEE Trans Magn 19(5):2097–2099. doi:10.1109/TMAG.1983.1062684
Zhang WP et al (2006) The study of an electromagnetic levitating micromotor for application in a rotating gyroscope. Sens Actuators A Phys 132(2):651–657. doi:10.1016/j.sna.2006.03.002
Acknowledgments
This research was partially supported by National Science Council (Taiwan) with Grant NSC96-2629-E-006-002. The authors would like to express their appreciation.
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Tsai, NC., Huang, WM. & Chiang, CW. Magnetic actuator design for single-axis micro-gyroscopes. Microsyst Technol 15, 493–503 (2009). https://doi.org/10.1007/s00542-008-0769-y
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DOI: https://doi.org/10.1007/s00542-008-0769-y