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Electroplated nickel based micro-machined disk resonators for high frequency applications

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Abstract

Microelectromechanical system (MEMS) based resonators can be used for filtering and frequency synthesis applications in many subcomponents of radio frequency wireless integrated circuits due to their small size, high level of frequency selectivity, low cost batch fabrication, ease of integration with CMOS circuits. Electroplated nickel is an attractive low cost material for CMOS compatible MEMS due to their low deposition temperatures. Among the different modes of vibration, radial-contour mode resonators are preferred for high frequency applications because they offer higher effective stiffness. Two different types of electroplated nickel based radial-contour bulk-mode circular disk resonator geometries which depend on capacitive actuation and readout technique is presented in this work. Material, mechanical and electrical characterizations were performed on these structures to show their functionality.

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Acknowledgments

The work presented here is supported by the National Programme on Micro and Smart Systems (NPMASS), Govt. of India. The authors would like to express their deep gratitude to Prof. Rudra Pratap and Prof. Navakanta Bhat for extending the infrastructure of characterization at Indian Institute of Science, Bangalore, India.

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Authors and Affiliations

  1. Advanced Technology Development Centre, Indian Institute of Technology, Kharagpur, India

    Ritesh Ray Chaudhuri

  2. Department of Electronics and Electrical Communication Engineering, Indian Institute of Technology, Kharagpur, India

    Tarun K. Bhattacharyya

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  1. Ritesh Ray Chaudhuri
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  2. Tarun K. Bhattacharyya
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Correspondence to Ritesh Ray Chaudhuri.

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Chaudhuri, R.R., Bhattacharyya, T.K. Electroplated nickel based micro-machined disk resonators for high frequency applications. Microsyst Technol 19, 525–535 (2013). https://doi.org/10.1007/s00542-012-1645-3

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  • DOI: https://doi.org/10.1007/s00542-012-1645-3

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