Abstract
Microelectrode arrays (MEA) have become an established tool in applied and fundamental research. Low impedance at the interface between tissue and conducting electrodes is of utmost importance for the electrical recording or stimulation of electrophysiological active cells such as cardiac myocytes and neurons. A common way to improve this interface is to increase the electrochemically active surface area of the electrode. In this paper the fabrication of microelectrodes covered with very high aspect ratio (AR > 100) gold nanopillars is presented and electrode biocompatibility is investigated using cell culture experiments. The nanopillar electrodes show decreased impedance over the entire scanned frequency range of 1 Hz–100 kHz and an impedance improvement of up to 89.5 at 1 kHz depending on nanopillar height. Neurons adhere well to the substrate and electrodes and signals with amplitudes up to ten times higher than with conventional gold electrodes were recorded in cell culture experiments.
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References
Arrigan D (2004) Nanoelectrodes, nanoelectrode arrays and their applications. Analyst 129(12):1157–1165
Bates JB, Chu YT, Stribling WT (1988) Surface topography and impedance of metal-electrolyte interfaces. Phys Rev Lett 60(7):627–630
Bauerdick S, Burkhardt C, Kern D, Nisch W (2003) Substrate-integrated microelectrodes with improved charge transfer capacity by 3-dimensional micro-fabrication. Biomed Microdevices 5(2):93–99
Bond A, Oldham K, Zoski C (1988) Theory of electrochemical processes at an inlaid disc microelectrode under steady-state conditions. J Electroanal Chem Interfacial Electrochem 245(1):71–104
Braet F, De Zanger R, Wisse E (2003) Drying cells for SEM, AFM and TEM by hexamethyldisilazane: a study on hepatic endothelial cells. J. microscopy 186(1):84–87
Bray D, Bagu J, Koegler P (1993) Comparison of hexamethyldisilazane (HMDS), Peldri II, and critical-point drying methods for scanning electron microscopy of biological specimens. Microsc Res Tech 26(6):489–495
Brüggemann D, Wolfrum B, Maybeck V, Mourzina Y, Jansen M, Offenhäusser A (2011) Nanostructured gold microelectrodes for extracellular recording from electrogenic cells. Nanotechnology 22:265104
Cao G (2004) Nanostructures & nanomaterials: synthesis, properties & applications, World Scientific Publishing Company
Cogan S (2008) Neural stimulation and recording electrodes. Annu Rev Biomed Eng 10:275–309
Dassinger F, Quednau S, Greiner F, Schlaak H, Hottes M, Stegmann C, Rauber M, Ensinger W, Trautmann C (2011) Einsatz von integrierten nanostrukturen in mikrosystemen, in Mikro-Nano-Integration Kongress, 12.Nov–13.Nov, VDE VERLAG GMBH, Berlin
Daus A, Layer P, Thielemann C (2012) A spheroid-based biosensor for the label-free detection of drug-induced field potential alterations. Sens Actuators B: Chemical 165(1):53–58
Enzel P, Zoller J, Bein T (1992) Intrazeolite assembly and pyrolysis of polyacrylonitrile. J Chem Soc 8:633–635
Fan S, Chapline M, Franklin N, Tombler T, Cassell A, Dai H (1999) Self-oriented regular arrays of carbon nanotubes and their field emission properties. Science 283(5401):512–514
Foss CA Jr, Hornyak G, Stockert J, Martin C (1992) Optical properties of composite membranes containing arrays of nanoscopic gold cylinders. J Phys Chem 96(19):7497–7499
Gesteland R, Howland B, Lettvin J, Pitts W (1959) Comments on microelectrodes. Proceedings of the IRE 47(11):1856–1862
Hulteen J, Martin C (1997) A general template-based method for the preparation of nanomaterials. J Mater Chem 7(7):1075–1087
Ivorra A, Genescà M, Sola A, Palacios L, Villa R, Hotter G, Aguilo J (2005) Bioimpedance dispersion width as a parameter to monitor living tissues. Physiol Meas 26:1–9
Kerner Z, Pajkossy T (2000) On the origin of capacitance dispersion of rough electrodes. Electrochim Acta 46(2–3):207–211
Kovacs G (1994) Microelectrode models for neural interfaces. In: Stenger D, McKenna T (eds) Enabling technologies for cultured neural networks. Academic Press, New York, pp 121–165
Kuffler S, Nicholls J, A Robert M (1976) From neuron to brain: a cellular approach to the function of the nervous system, Sinauer associates
Liu SH (1985) Fractal model for the ac response of a rough interface. Phys Rev Lett 55(5):529–532
Liu C, Bi Q, Matthews A (2001) EIS comparison on corrosion performance of PVD TiN and CrN coated mild steel in 0.5 N NaCl aqueous solution. Corros Sci 43(10):1953–1961
Lu Y, Yang M, Qu F, Shen G, Yu R (2007) Enzyme-functionalized gold nanowires for the fabrication of biosensors. Bioelectrochemistry 71(2):211–216
Martin C (1996) Membrane-based synthesis of nanomaterials. Chem Mat 8(8):1739–1746
Masuda H, Fukuda K (1995) Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268(5216):1466–1468
Nguyen-Vu B, Chen H, Cassell AM, Andrews R, Meyyappan M, Li J (2006) Vertically aligned carbon nanofiber arrays: an advance toward electrical-neural interfaces. Small 2(1):89–94
Nguyen-Vu B, Chen H, Cassell A, Andrews R, Meyyappan M, Li J (2007) Vertically aligned carbon nanofiber architecture as a multifunctional 3-d neural electrical interface. IEEE Trans Biomed Eng 54(6 Pt 1):1121–1128
Nick C, Joshi R, Schneider J, Thielemann C (2012) Three-dimensional carbon nanotube electrodes for extracellular recording of cardiac myocytes. Biointerphases 7(1–4):58–64
Nick C, Goldhammer M, Bestel R, Steger F, Daus A, Thielemann C (2013) Drcell—a software tool for the analysis of cell signals recorded with extracellular microelectrodes, accepted
Norlin A, Pan J, Leygraf C (2005) Investigation of electrochemical behavior of stimulation/sensing materials for pacemaker electrode applications. J Electrochem Soc 152(2):7–15
Oldham K, Zoski C (1988) Comparison of voltammetric steady states at hemispherical and disc microelectrodes. J Electroanal Chem Interfacial Electrochem 256(1):11–19
Pajkossy T (1991) Electrochemistry at fractal surfaces. J Electroanal Chem Interfacial Electrochem 30(1–2):1–11
Possin G (1970) A method for forming very small diameter wires. Rev Sci Instrum 41(5):772–774
Quednau S and Schlaak H (2011) Strukturierte herstellung und in situ-erzeugung von metallischen mikro- und nanodrähten in mikrosystemen, in Mikrosystemtechnik Kongress, 11.Oct–12.Oct, VDE VERLAG GMBH, Darmstadt, Germany
Shang H and Cao G (2010) Template-based synthesis of nanorod or nanowire arrays. Springer Handbook Nanotechology pp 169–186
Stern O (1924) Zur theorie der elektrolytischen doppelschicht, Z. Elektrochem 30:508–516
Thomas C, Springer P, Loeb G, Berwald-Netter Y, Okun L (1972) A miniature microelectrode array to monitor the bioelectric activity of cultured cells. Exp Cell Res 74(1):61–66
Toimil-Molares M (2012) Characterization and properties of micro-and nanowires of controlled size, composition, and geometry fabricated by electrodeposition and ion-track technology. Beilstein J Nanotechnol 3(1):860–883
Tonucci R, Justus B, Campillo A, Ford C (1992) Nanochannel array glass. Science 258:783–787
Velliste M, Perel S, Spalding M, Whitford A, Schwartz A (2008) Cortical control of a prosthetic arm for self-feeding. Nature 453(7198):1098–1101
Vlad A, Mátéfi-Tempfli M, Antohe V, Faniel S, Reckinger N, Olbrechts B, Crahay A, Bayot V, Piraux L, Melinte S et al (2008) Nanowire-decorated microscale metallic electrodes. Small 4(5):557–560
Wang H-W, Shieh C-F, Chen H-Y, Shiu W-C, Russo B, Cao G (2006) Standing [111] gold nanotube to nanorod arrays via template growth. Nanotechnology 17(10):2689–2694
Wu C-G, Bein T (1994) Conducting polyaniline filaments in a mesoporous channel host. Science 264:1757–1759
Yang K, Yiacoumi S, Tsouris C (2004) Electrical double layer formation, Dekker encyclopedia nanoscience and nanotechnology pp 1001–1014
Yang M, Qu F, Lu Y, He Y, Shen G, Yu R (2006) Platinum nanowire nanoelectrode array for the fabrication of biosensors. Biomaterials 27(35):5944–5950
Yoon H, Deshpande D, Ramachandran V, Varadan V (2008) Aligned nanowire growth using lithography-assisted bonding of a polycarbonate template for neural probe electrodes. Nanotechnology 19(2):025304
Acknowledgments
One of the authors (CN) would like to thank Studienstiftung des Deutschen Volkes for supporting this research. We also want to thank Prof. Hellmann of the University of Applied Sciences Aschaffenburg for providing access to the RIE-chamber.
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Nick, C., Quednau, S., Sarwar, R. et al. High aspect ratio gold nanopillars on microelectrodes for neural interfaces. Microsyst Technol 20, 1849–1857 (2014). https://doi.org/10.1007/s00542-013-1958-x
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DOI: https://doi.org/10.1007/s00542-013-1958-x