Abstract
The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI)—platinum (Pt)—SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy in lactated Ringer’s solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.
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Acknowledgments
We wish to thank Mrs. Károlyné Payer, Mr. Róbert Hodován and Mr. András Lőrincz for their support in microfabrication. We are also grateful to Attila Nagy for his help with packaging. This work was funded by the Bolyai János Grant of the HAS to Anita Pongrácz and the OTKA K81354, KTIA_13_NAP-A-IV/1-2-3-6, ANR-TÉT Multisca, TAMOP-4.2.1.B-11/2/KMR-2011-0002 grants to István Ulbert.
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Márton, G., Kiss, M., Orbán, G. et al. A polymer-based spiky microelectrode array for electrocorticography. Microsyst Technol 21, 619–624 (2015). https://doi.org/10.1007/s00542-014-2203-y
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DOI: https://doi.org/10.1007/s00542-014-2203-y