Skip to main content
SpringerLink
Log in

Glass capillaries based on a glass reflow into nano-trench for controlling light transmission

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

This paper reports the fabrication of Tempax glass capillaries based on a glass reflow into nano-trench for an optical modulator toward image sensing applications. The optical window consists of micrometer-order glass capillaries (porous solids) that can modulate the transmission light intensity by moving a liquid in and out of the porous solids. A high optical transmittance can be achieved due to refractive index matching when the liquid is penetrated into the porous solid. Otherwise, its light transmittance is low because of light reflection and scattering by air holes and capillary walls. The glass is completely filled into the nano-trench between silicon pillars under a high temperature process and assistance of enhancement of the surface wettability. Glass capillaries with depth of 8 μm, diameter of 1.2 μm, and the pitch of two capillaries of 2 μm have been achieved. The optical window integrated with an image sensor for an optical modulator is clearly demonstrated and a light modulation effect dependent on liquid penetration is observed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  • Antoio GD, Jose LP, Manuel N, Antonio P, Santiago R, Luis O (2014) Locating moving object in car-driving sequences. J Image Video Process 24:1–23

    Google Scholar 

  • Berge B, Peseux J (2000) Variable focal lens controlled by an external voltage: an application of electrowetting. Eur Phys J E 3:159–163

    Article  Google Scholar 

  • Chang C, Abe T, Esashi M (2004) Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD. J Microsyst Technol 10:97–102

    Article  Google Scholar 

  • Han J, Wang D, Shao L, Qian X, Cheng G, Han J (2014) Image visual attention computation and application via the learning of object atributes. J Mach Vis Appl 25:1671–1683

    Article  Google Scholar 

  • Haque RM, Wise KD (2013) A glass-in-silicon reflow process for three-dimensional microsystems. J Microelectromech Syst 22:1470–1477

    Article  Google Scholar 

  • Heikenfeld J, Zhou K, Kreit E, Raji B, Yang S, Sun B, Milarcik A, Clapp L, Schwartz R (2009) Electrofluidic displays using Young-Laplace transposition of brilliant pigment dispersions. J Nat Photon 3:292–296

    Article  Google Scholar 

  • Karaoguz H, Erkent O, Bozma HI (2014) RGB-D based place representation in topological maps. J Mach Vis Appl 25:1913–1927

    Article  Google Scholar 

  • Lee J, Moon H, Fowler J, Schoellhammer T, Kim CJ (2002) Electrowetting and electrowetting on dielectric for microscale liquid handling. J Sensor Actuator A 95:259–268

    Article  Google Scholar 

  • Levin A, Fergus R, Durand F, Freeman WT (2007) Image and depth from a conventional camera with a coded aperture. ACM Trans Graph 26:701–709

    Article  Google Scholar 

  • Levin A, Fergus R, Durand F, Freeman B (2009) Image and depth from a conventional camera with a coded aperture. In: Proceedings of SIGGRAPH

  • Liang F, Tang S, Zhang Y, Xu Z, Li J (2014) Pedestrian detection based on sparse coding and transfer learning. J Mach Vis Appl 25:1697–1709

    Article  Google Scholar 

  • Lin CW, Hsu CP, Yang HA, Wang WC, Fang W (2008) Implementation of silicon-on-glass MEMS devices with embedded through-wafer silicon vias using the glass reflow process for wafer-level packaging and 3D chip integration. J Micromech Microeng 18:025018

    Article  Google Scholar 

  • Morimoto NI, Swart JW (1996) Development of a cluster tool and analysis of deposition of silicon oxide by TEOS O2 PECVD. In: MRS proceedings, p 263

  • Nussbaum Ph, Volkel R, Eisner M, Haselbeck S (1997) Design, fabrication and testing of microlens arrays for sensors and microsystems. Pure Appl Opt 6:617–636

    Article  Google Scholar 

  • Ohtake H, Ishihara H, Fuse T, Koshiishi A, Samukawa S (2003) Highly selective and high rate SiO2 etching using argon-added C2F4/CF3I plasma. J Vac Sci Technol B 21:2142

    Article  Google Scholar 

  • Ren Ng, Marc L, Mathieu B, Gene D, Mark H, Pat H, Duval D (2005) Light field photography with a hand held plenoptic camera. Stanford Tech Report CTSR 2005-2

  • Szekeres A, Danesh P (1996) Mechanical stress in SiO2/Si structures formed by thermal oxidation of amorphous and crystalline silicon. J Semicond Sci Technol 11:1225–1230

    Article  Google Scholar 

  • Toan NV, Kubota T, Sekhar H, Samukawa S, Ono T (2014) Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology. J Micromech Microeng 24:085005

    Article  Google Scholar 

  • Veeraraghavan A, Raskar R, Agrawal A, Mohan A, Tumblin J (2007) Dappled photography: mask enhanced cameras for heterodyned light fields and coded aperture refocusing. ACM Trans Graph 26:69-1–69-12

    Article  Google Scholar 

Download references

Acknowledgments

Part of this work was performed in the Micro/Nanomachining Research Education Center (MNC) of Tohoku University. This work was supported by Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies.

Author information

Authors and Affiliations

  1. Microsystem Integration Center (μSIC), Tohoku University, Sendai, 980-8579, Japan

    Nguyen Van Toan & Naoki Inomata

  2. Core Technology Research & Development Center, Ricoh Institute of Technology, Natori, 981-1241, Japan

    Suguru Sangu

  3. Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan

    Takahito Ono

Authors
  1. Nguyen Van Toan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Suguru Sangu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Naoki Inomata
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Takahito Ono
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Nguyen Van Toan.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Van Toan, N., Sangu, S., Inomata, N. et al. Glass capillaries based on a glass reflow into nano-trench for controlling light transmission. Microsyst Technol 22, 2835–2840 (2016). https://doi.org/10.1007/s00542-015-2607-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-015-2607-3

Keywords

Search

Navigation