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Development of an inductor incorporated onto a carbon fiber MAV structural component

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Abstract

Insect-sized flapping wing micro air vehicles (MAVs) are beginning to take flight but have many technical hurdles to overcome. One of the greatest challenges of MAV design is attaining lightweight microelectronic components of optimal size and shape. In this paper an inductor for incorporation onto a carbon fiber MAV body component is modeled using a multiphysics and lumped parameter approach. A magnetostatic simulation using finite elements provides insight into the magnetic flux density distribution of the inductor. Simulation allows the inductor to be adapted to various shapes and sizes. Lumped values are generated based upon desired values for a MAV inductor. Microelectromechanical systems (MEMS) processes are used to fabricate the inductor directly on a MAV carbon fiber body (e.g. fuselage) component. Fabrication is prototyped on a semiconductor wafer. The inductor (a major contributor to the MAV weight budget) forms the basis for a lightweight, voltage transformer. By transferring the copper conductors to a structural component, the circuitry becomes part of the vehicle structure. This type of MEMS fabrication allows for optimal sizing, weight reduction, a lower part count and much higher levels of integration. These parameters are critical for operational MAV applications.

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Abbreviations

davg :

Average spiral diameter, μm

c1–4 :

Inductor constants

Cox :

Spiral substrate oxide capacitance, pF

Cs :

Spiral connector trace capacitance, pF

I:

Current, A

l :

Length of spiral trace, mm

L s :

Inductance of the spiral inductor, μH

n:

Number of spiral turns

Rs :

Spiral series resistance, Ω

Rsi :

Substrate resistance, Ω

tox :

Thickness of the trace oxide, μm

toxUnd :

Thickness of the connector oxide, μm

w:

Trace width, μm

εox :

Oxide permittivity, F/m

μ:

Permeability of the trace, H.m

ρ:

Fill ratio

σ:

Conductivity of the trace, Ω.m

ω:

Angular frequency, rad/s

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Acknowledgments

This research was done under the auspices of the Centre for Transportation Research at the Faculty of Engineering, University of Malaya. It is primarily funded by High Impact Research Grant UM.C/625/1/HIR/MOHE/ENG/53 (H-16001-D000053), along with a secondary University of Malaya grant: RG155-12AET. The authors are grateful to the Departments of Electrical and Mechanical Engineering, Faculty of Engineering, University of Malaya and Institute of Nano Electronic Engineering (INEE), Universiti Malaysia Perlis (UNIMAP) for providing experimental support with tools and machinery. Special thanks to Professor Dr. Uda Hashim for his guidance and support.

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Correspondence to Thomas Arthur Ward.

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Fearday, C., Ward, T.A., Soin, N. et al. Development of an inductor incorporated onto a carbon fiber MAV structural component. Microsyst Technol 23, 1433–1442 (2017). https://doi.org/10.1007/s00542-016-2958-4

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