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Solid freeform fabrication of piezoelectric sensors and actuators

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Abstract

The last two decades have witnessed the proliferation piezoelectric composite transducers for an array of sensor and actuator applications. In this article, a concise summary of the major methods used in composite making, with special emphasis on Solid Freeform Fabrication (SFF), is provided. Fused Deposition of Ceramics (FDC) and Sanders Prototyping (SP) are two SFF techniques that have been utilized to make a variety of novel piezocomposites with connectivity patterns including (1-3), (3-2), (3-1), (2-2) and (3-3). The FDC technique has also been used to prototype a number of actuators such as tube arrays, spiral, oval, telescoping, and monomorph multi-material bending actuators. It has been demonstrated that SFF technology is a viable option for fabricating piezocomposite sensors and actuators with intricate geometry, unorthodox internal architecture, and complex symmetry. The salient aspects of processing of such composite sensors and actuators are summarized, and structure-processing-property relations are elaborated on.

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References

  1. K. UCHINO, in “Piezoelectric Actuators and Ultrasonic Motors” (Kluwer Academic Publisher, New York, 1996).

    Google Scholar 

  2. B. JAFFE, W. R. COOK and H. JAFFE, in “Piezoelectric Ceramics” (R.A.N. Publishers, Marietta, Ohio, 1971).

    Google Scholar 

  3. Y. XU, in “Ferroelectric Materials and Their Applications” (North-Holland, Amsterdam, 1991).

    Google Scholar 

  4. L. E. CROSS, in “Ferroelectric ceramics: Tailoring properties for specific applications,” edited by N. Setter and E. L. Colla. (Birkhauser, Basel, 1993).

  5. G. GOODMAN, J. Amer. Ceram. Soc. 36 (1960) 368.

    Article  Google Scholar 

  6. E. C. SUBBARAO, ibid. 43 (1960) 439.

    Article  CAS  Google Scholar 

  7. G. Y. XU, Z. ZHONG, Y. BING, Z. G. YE, C. STOCK and G. SHIRANE, Phys. Rev. B 67 (2003) 104102.

    Google Scholar 

  8. Z. G. YE, Y. BING, J. GAO, A. A. BOKOV, P. STEPHENS, B. NOHEDA and G. SHIRANE, Phys. Rev. B 67 (2003) 104104.

    Google Scholar 

  9. H. M. JI, Z. BING and M. X. XU, Rare Metal Mater. Eng. 31 (2002) 292.

    Google Scholar 

  10. Y. H. BING, R. GUO and A. S. BHALLA, Ferroelectrics 242 (2000) 1.

    CAS  Google Scholar 

  11. Y. H. BING and Z. G. YE, J. Cryst. Growth 250 (2003) 118.

    Article  CAS  Google Scholar 

  12. N. YASUDA, N. UEMURA, H. OHWA, Y. YAMASHITA, M. IWATA, M. MAEDA, I. SUZUKI and Y. ISHIBASHI, J. Korean Physical Soc. 42 (2003) S1261.

    CAS  Google Scholar 

  13. M. IWATA, N. TOMISATO, H. ORIHARA, H. OHWA, N. YASUDA and Y. ISHIBASHI, Ferroelec. 261 (2001) 747.

    Google Scholar 

  14. M. IWATA, N. TOMISATO, H. ORIHARA, N. ARAI, N. TANAKA, H. OHWA, N. YASUDA and Y. ISHIBASHI, Jpn. J. Appl. Phys. Part 1 40 (2001) 5819.

    Article  CAS  Google Scholar 

  15. H. OHWA, M. IWATA, H. ORIHARA, N. YASUDA and Y. ISHIBASHI, J. Phys. Soc. Jpn. 70 (2001) 3149.

    Article  CAS  Google Scholar 

  16. R. E. EITEL, C. A. RANDALL, T. R. SHROUT and S. E. PARK, Jpn. J. Appl. Phys. Part 1 41 (2002) 2099.

    Article  CAS  Google Scholar 

  17. S. J. ZHANG, L. LEBRUN, S. RHEE, R. E. EITEL, C. A. RANDALL and T. R. SHROUT, J. Crys. Growth 236 (2002) 210.

    Article  CAS  Google Scholar 

  18. S. J. ZHANG, P. W. REHRIG, C. RANDALL and T. R. SHROUT, ibid. 234 (2002) 415.

    Article  CAS  Google Scholar 

  19. S. J. ZHANG, S. RHEE, C. A. RANDALL and T. R. SHROUT, Jpn. J. Appl. Phys. Part 1 41 (2002) 722.

    Article  CAS  Google Scholar 

  20. S. J. ZHANG, C. A. RANDALL and T. R. SHROUT, Appl. Phys. Lett. 83 (2003) 3150.

    Article  CAS  Google Scholar 

  21. L. E. CROSS, Nature 432(4) (2004) 84 (and references cited therein).

    Google Scholar 

  22. D. P. SKINNER, R. E. NEWNHAM and L. E. CROSS, Mat. Res. Bull. 13 (1978) 599.

    Article  CAS  Google Scholar 

  23. R. E. NEWNHAM, Ferroelec. (1986) 1.

  24. H. P. SAVAKUS, K. A. KLICKER and R. E. NEWNHAM, Mater. Res. Bull. 16 (1981); KLICKER, Ph.D. Thesis. (The Pennsylvania State University, 1980).

  25. J. W. SLIWA, S. AYTER and J. P. MOHR, U. S. Pat. No. 5239736, 1993.

  26. R. L. GENTILMAN, D. F. FIORE, H. T. PHAM, K. W. FRENCH and L. J. BOWEN, in “Ceramic Transactions, Ferroic Materials: Design, Preparation, and Characteristics”, edited by A. S. Bhalla, K. M. Nair, I. K. Lloyd, H. Yanagida and D. A. Payne. (American Ceramic Society, Westerville, OH, 1994), Vol. 43: 239.

  27. L. J. BOWEN and K. W. FRENCH, IEEE Proceedings of the Int’l Symp. on the Appl. of Ferroelec. (1992), 160.

  28. L. J. BOWEN, R. L. GENTILMAN, H. T. PHAM, D. F. FIORE and K. W. FRENCH, in Proceedings of the IEEE Ultrasonics Symposium (1993), 499.

  29. R. L. GENTILMAN, D. FIORE, H. PHAM, W. SERWATKA and L. BOWEN, in Proceedings of the SPIE: Industrial and Commercial Applications of Smart Structures Technologies, Vol. 2447, (1995) p. 274.

  30. W. WERSING, in Proceedings IEEE International Symposium on Applications of Ferroelectrics (1986) p. 212.

  31. E. W. BECKER, W. EHRFELD, P. HAGMANN, A. MANER and D. MUNCHMEYER, Microelec. Eng. 4 (1986) 35.

    Article  CAS  Google Scholar 

  32. U. BAST, D. CRAMER and A. Wolff, in Ceramics Today-Tomorrow's Ceramics, edited by. P. Vincenzini. (Elsevier Science Publishers, Amsterdam, 1991), Vol. 66C.

  33. U. BAST, H. KAARMANN, K. LUBITZ, M. VOGT, W. WERSING and D. CRAMER, U.S. Patent No. 5164920 (1992).

  34. K. LUBITZ, A. WOLFF and G. PREU, Ferroelec. 133 (1992).

  35. K. LUBITZ, A. WOLFF and G. PREU, in IEEE Ultrasonics Symposium (Piscataway, New Jersey, 1993).

  36. K. LUBITZ, A. WOLFF and B. SCHULMEYER, Ferroelec. 133 (1992) 21.

    CAS  Google Scholar 

  37. K. A. LUBITZ, A. WOLFF and G. PREU, Proc. 1993 IEEE Ultrasonics Symposium (Piscataway, New Jersey, 1993).

  38. D. J. WALLER, M. S. Thesis, Rutgers University, New Brunswick, NJ (1991).

  39. D. J. WALLER, A. SAFARI and R. J. CARD, Proc. of the 7th IEEE Int’l Symp. on the Appl. of Ferroelectr., IEEE, (Piscataway, NJ, USA, 1990) p. 82.

  40. J. ZOLA, U.S. Patent No. 4572981 (1986).

  41. S. LIVNEH, V. F. JANAS and A. SAFARI, J. Am. Ceram. Soc. 78 (1995) 1900.

    Article  CAS  Google Scholar 

  42. D. J. WALLER, T. IQBAL and A. SAFARI, ibid. 72 (1989) 322.

    Article  CAS  Google Scholar 

  43. S. S. LIVNEH, S. M. TING and A. SAFARI, Ferroelec. 157 (1994) 421.

    CAS  Google Scholar 

  44. J. W. STEVENSON, M. R. REIDMEYER and W. HEUBNER, J. Am. Ceram. Soc. 77 (1994) 2491.

    Article  Google Scholar 

  45. C. A. RANDALL, D. V. MILLER, J. H. ADAIR and A. S. BHALLA, J. Mater. Res. 8 (1993) 899.

    CAS  Google Scholar 

  46. C. A. RANDALL, C. P. BOWEN, T. R. SHROUT, A. S. BHALLA and R. E. NEWNHAM, in Proceedings of the 6th U.S. Japan Seminar on Dielectric and Piezoelectric Ceramics (1993) p. 152.

  47. M. EYETT, D. BAUERLE and W. WERSING, J. Appl. Phys. 62 (1987) 1511.

    Article  CAS  Google Scholar 

  48. Y. OHARA, M. MIYAYAMA, K. KOUMOTO and H. YANAGIDA, Sensors and Actuators A 40 (1994) 345.

    Article  Google Scholar 

  49. Idem., J. Mater. Sci. Lett., 12 (1993) 1279.

    Article  CAS  Google Scholar 

  50. M. J. CREEDON, S. GOPALAKRISHAN and W. A. SCHULZE, IEEE International Symposium on the Application of Ferroelectrics (State College, PA, 1994).

  51. M. J. CREEDON and W. A. SCHULZE, Ferroelec. 153 (1994) 333.

    Google Scholar 

  52. J. D. ERVIN, D. BREI, C. A. V. HOY, J. R. MAWDSLEY and J. W. HALLORAN, in Proceedings of the ASME Aerospace Division (1996), Vol. 52, pp. 695–697.

  53. C. A. V. HOY, A. BARDA, M. GRIFFITH and J. W. HALLORAN, J. Am. Ceram. Soc. 81 (1998) 152.

    Article  Google Scholar 

  54. D. P. SKINNER, R. E. NEWNHAM and L. E. CROSS, Mat. Res. Bull. (1978) 1553.

  55. K. A. KLICKER, W. A. SHULTZE and J. V. BIGGERS, J. Am. Ceram. Soc. 65 (1982) C208.

    Article  CAS  Google Scholar 

  56. K. RITTENMYER, T. SHROUT, W. A. SCHULZE and R. E. NEWNHAM, Ferroelec. 41 (1982) 323.

    Google Scholar 

  57. Materials System Inc., www.matsysinc.com, (2004).

  58. W. HACKENBERGER, P. MING-JEN, D. KUBAN, T. RITTER and T. SHROUT, Novel method for producing high frequency 2-2 composites from PZT ceramic, in IEEE Proceedings of the Ultrasonics Symposium, (2000), Vol. 2, pp. 969.

  59. R. P. SCHAEFFER, V. F. JANAS and A. SAFARI, Proceedings of the 10th IEEE International Symposium on Applications of Ferroelectrics, Part 2 of 2 (1996).

  60. W. HUEBNER, M. R. REIDMEYER, J. W. STEVENSON and L. BUSSE, Proceedings of the 9th IEEE International Symposium on Applications of Ferroelectrics (University Park, PA, USA, 1994).

  61. D. M. MILLS and S. W. SMITH, IEEE Transactions of the Ultrasonics, Ferroelectrics and Frequency Control. 49 (2002) 1005.

    Article  Google Scholar 

  62. C. VAN HOY, A. BARDA, M. GRIFFITH and J. W. HALLORAN, J. Amer. Ceramic Soc. 81 (1998) 152.

    CAS  Google Scholar 

  63. J. W. HALLORAN, Brit. Ceramic Trans. 98 (1999) 299.

    Article  CAS  Google Scholar 

  64. H. L. MARCUS, J. J. BEAMAN, J. W. BARLOW, D. L. BOURELL and R. H. CRAWFORD, Solid Freeform Fabrication Symposium, (Austin, TX, 1992).

  65. H. L. MARCUS, J. J. BEAMEN, J. W. BARLOW, D. L. BOURELL and R. H. CRAWFORD, Solid Freeform Fabrication Proceedings (Austin, TX, 1992).

  66. H. L. MARCUS, J. J. BEAMEN, J. W. BARLOW, D. L. BOURELL and R. H. CRAWFORD, Solid Freeform Fabrication Proceedings, (University of Texas at Austin, Austin, TX, 1991).

  67. H. L. MARCUS and D. L. BOURELL, Adv. Mat. Proc. 9 (1993) 677.

    Google Scholar 

  68. H. L. MARCUS, Mech. Eng. 117 (1995) 62.

    Google Scholar 

  69. D. L. BOURELL, J. J. BEAMEN, H. L. MARCUS and J. W. BARLOW, Solid Freeform Fabrication Proceedings (Austin, TX, 1990).

  70. P. F. JACOBS, “Stereolithography and Other RP & M Technologies from Rapid Prototyping to Rapid Tooling,” Dearborn, MI: Society of Manufacturing Engineers (1995).

  71. P. F. JACOBS, “Rapid Prototyping & Manufacturing: Fundamentals of StereoLithography,” Dearborn, MI: Society of Manufacturing Engineers (1992).

  72. M. FEYGIN and B. HSIEH, in Proceedings of the Solid Freeform Fabrication Symposium. (1991), p. 123.

  73. M. FEYGIN, U. S. Patent No. 5354414 (1994).

  74. J. CESARANO, T. A. BAER and P. CALVERT, in Proceedings of the Solid Freeform Fabrication Symposium. (1997) Vol. 8, pp. 25.

  75. J. CESARANO, B. H. KING and H. B. DENHAM, in Proceedings of Solid Freeform Fabrication Symposium, (1998) Vol. 9, pp. 697.

  76. E. M. SACHS, M. J. CIMA, P. WILLIAMS, D. BRANCAZIO and J. CORNIE, J. Eng. Ind. 114 (1992) 481.

    Article  Google Scholar 

  77. R. K. PANDA, Ph.D. Thesis, Rutgers University, New Brunswick, New Jersey (1998).

  78. J. CESARANO and P. CALVERT, U.S. Patent No. 6027326 (2000).

  79. A. SAFARI, Ph.D. Thesis, The Pennsylvania State University, State College, PA (1983).

  80. W. SCHULZE, Ferroelectrics 50 (1983) 33.

    Google Scholar 

  81. T. R. SHROUT, L. J. BOWEN and W. A. SCHULZE, Mater. Res. Bulletin 15 (1980) 1371.

    Article  CAS  Google Scholar 

  82. A. SAFARI, ibid. 17 (1982) 301.

    Article  CAS  Google Scholar 

  83. S. TURCU, M.S. Thesis, Rutgers University, New Brunswick, NJ (2002).

  84. S. TURCU, B. JADIDIAN, S. C. DANFORTH and A. SAFARI, J. Electroc. 9 (2002) 165.

    Article  CAS  Google Scholar 

  85. C. W. NAN, L. LIU and L. LI, J. Phys. D 33 (2000) 2988.

    Google Scholar 

  86. C. W. NAN and G. W. WENG, J. Appl. Phys. 88 (2000) 416.

    Article  CAS  Google Scholar 

  87. A. BANDYOPADHYAY, R. K. PANDA, V. E. JANAS, M. K. AGARWALA, S. C. DANFORTH and A. SAFARI, J. Amer. Ceramic Society 80 (1997) 1366.

    Article  CAS  Google Scholar 

  88. A. SAFARI, V. F. JANAS and R. K. PANDA, SPIE Symposium on Smart Structures and Materials, (San Diego, CA, 1996).

  89. A. SAFARI, J. CESARANO, P. G. CLEM and B. BENDER, Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectronics, (Nara, Japan, 2002).

  90. G. H. HAERTLING, Am. Ceram. Soc. Bull. 73 (1994) 93.

    CAS  Google Scholar 

  91. F. MOHAMMADI, A. KHOLKIN, B. JADIDIAN and A. SAFARI, Appl. Phys. Lett. 75 (1999) 2488.

    Article  CAS  Google Scholar 

  92. Q. M. WANG, Q. ZHANG, B. XU, R. LIU and L. E. CROSS, J. Appl. Phys. 86 (1999) 3352.

    Article  CAS  Google Scholar 

  93. A. SAFARI, S. C. DANFORTH, M. A. JAFARI, M. ALLAHVERDI, B. JADIDIAN, F. MOHAMMADI, N. VANKATARAMAN and S. RANGARAJAN, in Proceedings of the 9th European Conference on Rapid Prototyping and Manufacturing, (2000) p. 247.

  94. A. SAFARI and S. C. DANFORTH, in Proceedings of the 11th IEEE International Symposium on the Applications of Ferroelectrics, (1998) p. 229.

  95. A. BANDYOPADHYAY, R. K. PANDA, T. F. MCNULTY, F. MOHAMMADI, S. C. DANFORTH and A. SAFARI, Rapid Prototyping Journal 4 (1998) 37.

    Article  Google Scholar 

  96. A. SAFARI and M. ALLAHVERDI, Ceram. Eng. Sci. Proc. 22 (2001) 473.

    CAS  Google Scholar 

  97. F. MOHAMMADI, Ph.D. Thesis, Department of Ceramic and Materials Engineering, Rutgers University, New Jersey, USA (2001).

  98. F. MOHAMMADI, A. KHOLKIN, S. C. DANFORTH and A. SAFARI, in Proceedings of the 11th IEEE International Symposium on the Applications of Ferroelectrics, pp. 273–275 (1998).

  99. S. A. WISE, Sensors and Actuators A 69 (1998) 33.

    CAS  Google Scholar 

  100. Q. M. ZHANG, H. WANG and L. E. CROSS, J. Mater. Sci. 28 (1993) 3962.

    Article  CAS  Google Scholar 

  101. Y. SUGAWARA, K. ONITSUKA, S. YOSHIKAWA, Q. C. XU, R. E. NEWNHAM and K. UCHINO, J. Am. Ceram. Soc. 75 (1992) 996.

    Article  CAS  Google Scholar 

  102. A. M. UMARJI, A. L. KHOLKIN, T. F. MCNULTY, S. C. DANFORTH and A. SAFARI, in Proceedings of the 11th IEEE International Symposium on the Applications of Ferroelectrics, (1998) p. 269.

  103. T. W. CHOU, B. A. CHEESEMAN, A. SAFARI and S. C. DANFORTH, Ceramic Eng. Sci. Proc. 22 (2001) 497.

    Article  CAS  Google Scholar 

  104. J. CHEN, Q. M. ZHANG, L. E. CROSS and C. M. TROTTIER, in Proceedings of International Conference on Intelligent Materials (ICIM), Williamsburg, VA, pp. 316–318 (1994).

  105. M. ALLAHVERDI and A. SAFARI, J. Eur. Ceram. Soc. 21 (2001) 1485.

    Article  CAS  Google Scholar 

  106. M. ALLAHVERDI, B. JADIDIAN, B. HARPER, S. RANGARAJAN, M. JAFARI, S. C. DANFORTH and A. SAFARI, in Proceedings of 12th IEEE International Symposium on Applications of Ferroelectrics, edited by S. K. Streiffer, B. J. Gibbons and T. Tsurumi, (IEEE-UFFC, New Jersey, 2001) p. 381.

  107. B. JADIDIAN, M. ALLAHVERDI, F. MOHAMMADI and A. SAFARI, Appl. Phys. Lett. 80 (2002) 1981.

    Article  CAS  Google Scholar 

  108. R. E. NEWNHAM, D. C. MARKLEY, R. J. MEYER JR, W. J. HUGHES, A.-C. HLADKY-HENNION and J. K. COCHRAN JR, Ceramic Transactions 150 (2004) 427.

    CAS  Google Scholar 

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Safari, A., Allahverdi, M. & Akdogan, E.K. Solid freeform fabrication of piezoelectric sensors and actuators. J Mater Sci 41, 177–198 (2006). https://doi.org/10.1007/s10853-005-6062-x

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