Abstract
In this paper we outline two recent results which demonstrate the utility of deep-level engineering in silicon photonics. We describe the integration of silicon waveguide p-i-n photo-detectors in a ring (or race-track) resonator structure. The detectors are made sensitive to wavelengths around 1,550 nm via the introduction of deep-levels into the intrinsic volume of the waveguide detector. By exploiting the multiple-pass of the optical signal through the detector, we are able to significantly decrease the size of the detector structure (relative to straight waveguide detectors) while maintaining excellent responsivity on resonance. We also describe the use of deep-levels for optical modulation. Preliminary results show that thallium doped silicon waveguides may be switched between a dark and transparent condition through the variation of phosphorus doping. It is suggested that active devices may be fabricated in such a way as to vary the occupancy of the thallium level through field mediated modulation. The straightforward fabrication methods described lend themselves to a high-volume, high yield manufacturing process which should find general applicability in wavelength division multiplexing systems.
Similar content being viewed by others
References
Bradley J.D.B., Jessop P.E., Knights A.P.: Silicon waveguide-integrated optical power monitor with enhanced sensitivity at 1550 nm. Appl. Phys. Lett. 86, 241103 (2005)
Doylend J.K., Jessop P.E., Knights A.P.: Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection. Opt. Express 18, 14671–14678 (2010)
Fang A.W., Park H., Cohen O., Jones R., Paniccia M.J., Bowers J.E.: Electrically pumped hybrid AlGaInAs-silicon evanescent laser. Opt. Express 14, 9203–9210 (2006)
Gardes F.Y., Thomson D.J., Emerson N., Reed G.T.: 40 Gb/s silicon photonics modulator for TE and TM polarisations. Opt. Express 19, 11804–11814 (2011)
Geis M.W., Spector S.J., Grein M.E., Yoon J.U., Lennon D.M., Lyszczarz T.M.: Silicon waveguide infrared photodiodes with > 35 GHz bandwidth and phototransistors with 50 AW−1 response. Opt. Express 17, 5193–5204 (2009)
Hochberg M., Baehr-Jones T.: Towards fabless silicon photonics. Nat. Photonics 4, 492–494 (2010)
Huante-Ceron, E., Logan, D., Knights, A.P., Jessop, P.E.: Deep-level charge state control: a novel method for optical modulation in silicon waveguides. In: Kubby, J., Reed, G.T. (eds.) Silicon Photonics VII. Proceedings of SPIE (SPIE, Bellingham), vol. 8266, p. 82660 (2012)
Logan D.F., Jessop P.E., Knights A.P.: Modeling defect enhanced detection at 1550 nm in integrated silicon waveguide photodetectors. J. Lightwave Technol. 27, 930–937 (2009a)
Logan D.F., Jessop P.E., Knights A.P., Wojcik G., Goebel A.: Optical modulation in silicon waveguides via charge state control of deep levels. Opt. Express 17, 18571–18580 (2009b)
Logan D.F., Murray K.J., Ackert J.J., Velha P., Sorel M., DeLa Rue R.M., Jessop P.E., Knights A.P.: Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm. J. Opt. 13, 125503 (2011a)
Logan D.F., Velha P., Sorel M., DeLa Rue R.M., Wojcik G., Goebel A., Jessop P.E., Knights A.P.: Charge state switching of deep levels for low-power optical modulation in silicon waveguides. Opt. Lett. 36, 3717–3719 (2011b)
Logan D.F., Velha P., Sorel M., DeLa Rue R.M., Knights A.P., Jessop P.E.: Defect-enhanced silicon- on-insulator waveguide resonant photodetector with high sensitivity at 1550nm. IEEE Photonics Technol. Lett. 22, 1530–1532 (2010)
Pavesi L., Guillot G.: Optical Interconnects—The Silicon Approach. Springer, Berlin (2010)
Wang T., Liu H., Lee A., Pozzi F., Seeds A.: 1.3-μm InAs/GaAs quantum-dot lasers monolithically grown on Si substrates. Opt. Express 19, 11381–11386 (2011)
Yin T., Cohen R., Morse M.M., Sarid G., Chetrit Y., Rubin D., Paniccia M.: 31GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator substrate. Opt. Express 15, 13965–13971 (2007)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Knights, A.P., Ackert, J.J., Logan, D.F. et al. Deep-levels in silicon waveguides: a route to high yield fabrication. Opt Quant Electron 44, 575–580 (2012). https://doi.org/10.1007/s11082-012-9593-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11082-012-9593-9