Abstract
Ternary compound films of ZnO–In2O3 system were prepared by spray pyrolysis method. The films were deposited on heated glass substrates by pyrolytic decomposition of zinc chloride and indium chloride in distilled water with different ratio x of [Zn] to [Zn + In] (x = [Zn]/[Zn + In]). The phase change, chemical composition, electrical and optical properties of the Zn–In oxides were investigated over wide range of ratio x. Quasi-amorphous sub-oxide films with thickness of 200–400 nm were first obtained, the films were then annealed in Argon atmosphere at 550 °C for 1 h. To optimize the physical properties of sprayed ZnO–In2O3 thin films, we carry out on a systematic study of their microstructural characterization and transport properties. Continuous structural variation from In2O3 to ZnO through Zn2In2O5 and Zn3In2O6 was observed on the deposited films with increasing the ratio x. Maximum of conductivity of 1.47 × 103 Ω−1 cm−1 was reached for x = 0.5 (at.%). We also concluded that the transport properties of the films are greatly governed by their microstructure.
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Thanks are due to Drs H. Bougharraf, A. Kachouane and A. Bougrine for their fruitful cooperation.
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This article is part of the Topical Collection on Advanced Materials for Photonics and Electronics.
Guest Edited by Bouchta Sahraoui, Yahia Boughaleb, Kariem Arof, Anna Zawadzka.
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Dounia, R., Migalska-Zalas, A., Addou, M. et al. Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique. Opt Quant Electron 48, 339 (2016). https://doi.org/10.1007/s11082-016-0596-9
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DOI: https://doi.org/10.1007/s11082-016-0596-9