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Structure and electrical characteristics of Nb-doped SrTiO3 substrates

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Chinese Science Bulletin

Abstract

The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties because of the nonuniformity of Nb-doping. The uniformly doped high-quality substrates are extremely important for fabricating multilayer structure and devices. In addition, the experimental results also provide us with SEM method to judge the uniformity of conducting material.

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Authors and Affiliations

  1. Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, China

    Huang Yanhong, Lü Huibin, Guo Haizhong, Liu Lifeng, HE Meng, Chen Zhenghao, Zhou Yueliang, Zhao Kun, Jin Kuijuan & Yang Guozen

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  1. Huang Yanhong
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  2. Lü Huibin
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  3. Guo Haizhong
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  4. Liu Lifeng
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  5. HE Meng
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  6. Chen Zhenghao
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  7. Zhou Yueliang
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  8. Zhao Kun
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  9. Jin Kuijuan
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  10. Yang Guozen
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Corresponding author

Correspondence to Lü Huibin.

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Huang, Y., Lü, H., Guo, H. et al. Structure and electrical characteristics of Nb-doped SrTiO3 substrates. CHINESE SCI BULL 51, 2035–2037 (2006). https://doi.org/10.1007/s11434-006-2075-3

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  • DOI: https://doi.org/10.1007/s11434-006-2075-3

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