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Lubrication of digital micromirrordevicesTM

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Abstract

Nearly fifty lubricants have been investigated for use in theDigital Micromirror DeviceTM (DMDTM). Theexploration has ranged from self-assembled monolayers (SAMs),to fluids, to solid lubricants. This paper discusses several ofthe various approaches that have been taken to lubricate thismicroelectromechanical systems (MEMS) device and to reduce the adhesion between its contacting surfaces.

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  1. S.A. Henck
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Henck, S. Lubrication of digital micromirrordevicesTM . Tribology Letters 3, 239–247 (1997). https://doi.org/10.1023/A:1019129021492

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