Abstract
The ion-optical properties and other characteristics of various versions of a double-focusing mass separator are studied. In these designs, the ion transit path is shortened by appropriately selecting the geometry of the ion-optical system. The resolving power of the separating systems is determined with allowance for second-order aberrations.
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Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 11, 2001, pp. 124–126.
Original Russian Text Copyright © 2001 by Kuzema, Mordik.
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Kuzema, S.A., Mordik, S.N. Small-size systems for separation of primary ion beams in microprobe equipment. Tech. Phys. 46, 1470–1472 (2001). https://doi.org/10.1134/1.1418516
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DOI: https://doi.org/10.1134/1.1418516