Abstract
The approach to determination of the thickness and the refractive indices of dielectric films obtained in searching experiments is discussed. Experiments of this kind often exhibit unpredictable values of thickness and refractive indices of films. Nondestructive noncontact methods of spectrophotometry and ellipsometry not involving preliminary preparation of samples are applied. The approach to determination of the thickness and the refractive indices of films is illustrated by means of samples of silicon carbonitride films obtained on silicon substrates by plasma-chemical decomposition of gas-phase trimethyl(phenylamino)silane.
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References
K. L. Chopra and I. Kaur, Thin Film Device Applications (Plenum Press, New York, London, 1983).
N. V. Rumak and V. V. Khat’ko, Dielectric Films in Solid State Microelectronics (Navuka Tekhn., Minsk, 1990) [in Russian].
R. Swanepoel, J. Phys. E: Sci. Instrum. 16, 1214 (1983).
R. Swanepoel, J. Phys. E: Sci. Instrum. 17, 896 (1984).
B. M. Ayupov, Poverkhnost’, No. 4, 59 (2000).
B. M. Ayupov, S. F. Devyatova, V. G. Erkov, and L. A. Semenova, Mikroelektronika 37, 163 (2008).
B. M. Ayupov, V. A. Gritsenko, Hei. Wong, and C. W. Kim, J. Electrochem. Soc. 152(12), F277 (2006).
D. A. Holmes, Appl. Opt. 6, 168 (1967).
Yoriume Yutaka, J. Opt. Soc. Am. 73, 888 (1983).
M. S. Finarev, in Ellipsometry: A Method of Studying Surface (Nauka, Novosibirsk, 1983), p. 16 [in Russian].
D. R. Secrist and J. D. Mackenzie, Am. Ceram. Soc. Bull. 45, 784 (1966).
W. Kern and D. Puotineu, RCA Rev. 70, 187 (1970).
A. V. Rzhanov, K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, Principles of Ellipsometry (Nauka, Novosibirsk, 1982) [in Russian].
T. Shup, Solution of Engineering Problems on a Computer (Mir, Moscow, 1975) [in Russian].
D. Himmelblau, Applied Nonlinear Programming (McGraw-Hill, New York, 1972; Mir, Moscow, 1975).
F. Reisman, J. Appl. Phys. 36, 3804 (1965).
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Original Russian Text © B.M. Ayupov, Yu.M. Rumyantsev, V.R. Shayapov, 2010, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 5, pp. 100–105.
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Ayupov, B.M., Rumyantsev, Y.M. & Shayapov, V.R. Features of determination of thickness of dielectric films obtained in searching experiments. J. Surf. Investig. 4, 452–457 (2010). https://doi.org/10.1134/S1027451010030158
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DOI: https://doi.org/10.1134/S1027451010030158