Skip to main content
Log in

Field-Emission Cathodes Based on Microchannel Plates

  • ELEMENTS OF INTEGRATED ELECTRONICS
  • Published:
Semiconductors Aims and scope Submit manuscript

Abstract

The existing methods of fabricating low-field cathodes do not permit the development of device structures that comply with the requirements of developers of systems. In this work, large-area field-emission cathodes with homogeneous emission properties of the working surface and low working voltages (<1 kV) are considered. A Spindt cathode with a number of silicon microtips up to 6000 and a packing density of ~1 × 105 cm–2 is investigated. Titanium nitride and carbon films are deposited onto microtips using the electric-arc method. It is shown that the cathode has low emission homogeneity due to the problem of reproducing microtips of the same shape and size. A cathode based on a microchannel plate with channels 6 μm in diameter, inside which graphite-like nanostructures are formed by the electric-arc method, is fabricated. It is found that an increase in the electron flux in the channels of a microchannel plate can result in a considerable decrease in the operating voltage (<1 kV) and attain high emission homogeneity at the highest admissible output current.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.

Similar content being viewed by others

REFERENCES

  1. V. Zhigalov, V. Petukhov, A. Emelianov, et al., in Proceedings of the IEEE Young Researches in Electrical and Electronic Engineering ELConRus,2017, p. 1449.

  2. R. V. Konakova, O. B. Okhrimenko, A. M. Svetlichnyi, O. A. Ageev, E. Yu. Volkov, A. S. Kolomiytsev, I. L. Jityaev, and O. B. Spiridonov, Semiconductors 49, 1242 (2015).

    Article  ADS  Google Scholar 

  3. G. G. Sominskii and T. A. Tumareva, Izv. Vyssh. Uchebn. Zaved., PND 17 (3), 17 (2009).

    Google Scholar 

  4. G. N. Fursei, M. A. Polyakov, A. A. Kantonistov, A. M. Yafyasov, B. S. Pavlov, and V. B. Bozhevol’nov, Tech. Phys. 58, 845 (2013).

    Article  Google Scholar 

  5. S. G. Savel’ev, N. I. Sinitsyn, G. V. Torgashov, and Yu. A. Grigor’ev, in Proceedings of the International Interschool Conference on Modern Problems of Microwave Electronics and Radiophysics, Saratov,2001, p. 138.

  6. E. Z. Khamdokhov, Z. M. Khamdokhov, V. S. Kulikauskas, et al., J. Surf. Invest.: X-ray, Synchrotr. Neutron Tech. 8, 12997 (2014).

    Google Scholar 

  7. C. A. Spindt, I. Brodie, L. Humphry, and E. R. Westerberg, J. Appl. Phys. 47, 5248 (1976).

    Article  ADS  Google Scholar 

  8. A. Z. Khamdokhov and E. Z. Khamdokhov, RF Patent No. 2497977, Byull. Izobret., No. 31 (2013).

  9. E. Z. Khamdohov, R. Sh. Teshev, Z. M. Khamdohov, A. Z. Khamdohov, Z. H. Kalajokov, and H. H. Kalajokov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8, 1306 (2014).

    Article  Google Scholar 

  10. E. Z. Khamdokhov and Z. M. Khamdokhov, RF Patent No. 2640355 (2016).

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Z. M. Khamdokhov.

Additional information

Translated by N. Korovin

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Khamdokhov, Z.M., Margushev, Z.C., Khamdokhov, E.Z. et al. Field-Emission Cathodes Based on Microchannel Plates. Semiconductors 53, 2037–2039 (2019). https://doi.org/10.1134/S1063782619150090

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063782619150090

Keywords:

Navigation