Skip to main content
SpringerLink
Log in

Beam-Assisted CVD of Microelectronic Films

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

The properties of SiO2 and Si3N4 films deposited by an ArF excimer laser, glow discharge electron beam and conventional plasma-enhanced CVD are compared. The deposition apparatus, technique, and conditions in addition to the physical, chemical and electrical properties of the films are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P. K. Boyer, G. A. Roche, W. H. Ritchie, and G. J. Collins, Appl. Phys. Lett. 40, 716 (1982).

    Article  CAS  Google Scholar 

  2. R. Solanki, W. H. Ritchie and G. J. Collins, Appl. Phys. Lett. 43, 454 (1983).

    Article  CAS  Google Scholar 

  3. R. F. Karlicek, V. M. Donnelly and G. J. Collins, J. Appl. Phys. 53, 1084 (1982).

    Article  CAS  Google Scholar 

  4. P. K. Boyer, G. A. Roche, G. J. Collins, and W. H. Ritchie, Proceedings Materials Research Society, Section 14.1, November 1–4, Boston, Massachusetts (1982).

  5. L. R. Thompson, J. J. Rocca, K. Emery, P. K. Boyer, and G. J. Collins, Appl. Phys. Lett. 43, 777 (1983).

    Article  CAS  Google Scholar 

  6. L. R. Thompson, L. Gobis, D. Bishop, J. J. Rocca, K. Emery and G. J. Collins, J. Electrochem. Soc. 131, 462 (1984).

    Article  CAS  Google Scholar 

  7. N. R. Griener, J. Chem. Phys. 47, 4373 (1967).

    Article  Google Scholar 

  8. Zeng qi Yu, J. J. Rocca, J. D. Meyer and G. J. Collins, J. Appl. Phys. 53, 4704 (1982).

    Article  Google Scholar 

  9. H. Massey and E. Burhop, Electronic and Ionic Impact Phenomena, Oxford University Press, London, Vol. 1 (1969).

    Google Scholar 

  10. H. Dun, P. Pan, F. R. White, R. W. Douse, J. Electrochem. Soc. 128, 1555 (1981).

    Article  CAS  Google Scholar 

  11. P. K. Boyer, W. H. Ritchie, and G. J. Collins, J. Electrochem. Soc. 129, 2155 (1982).

    Article  CAS  Google Scholar 

  12. J. Zavelovich, M. Rothschield, W. Gornik, and C. K. Rhodes, J. Chem. Phys. 74, 12, 1981.

    Article  Google Scholar 

  13. W. Pliskin, J. Vac. Sci. Technol. 14, 1064 (1977).

    Article  CAS  Google Scholar 

  14. A. C. Adams, J. Electrochem. Soc. 128, 1545 (1981).

    Article  CAS  Google Scholar 

  15. H. J. Stein, V. A. Wells and R. E. Hampy, J. Electrochem. Soc. 126, 1750 (1979).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, Colorado State University, Fort Collins, CO, 80523, USA

    K. A. Emery, L. R. Thompson, D. Bishop, H. Zarnani, P. K. Boyer, C. A. Moore, J. J. Rocca & G. J. Collins

Authors
  1. K. A. Emery
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. L. R. Thompson
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. Bishop
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. H. Zarnani
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P. K. Boyer
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. C. A. Moore
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. J. J. Rocca
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. G. J. Collins
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Emery, K.A., Thompson, L.R., Bishop, D. et al. Beam-Assisted CVD of Microelectronic Films. MRS Online Proceedings Library 29, 81–92 (1983). https://doi.org/10.1557/PROC-29-81

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-29-81

Search

Navigation